JPS5348477A - Formation method of photoresist mask - Google Patents
Formation method of photoresist maskInfo
- Publication number
- JPS5348477A JPS5348477A JP12277376A JP12277376A JPS5348477A JP S5348477 A JPS5348477 A JP S5348477A JP 12277376 A JP12277376 A JP 12277376A JP 12277376 A JP12277376 A JP 12277376A JP S5348477 A JPS5348477 A JP S5348477A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- formation method
- photoresist mask
- resist
- fluidizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To perform flattening by coating photoresist over the entire surface of a specimen, etching off the resist corresponding to the resist film thickness over the bulged part outside grooves and heating and fluidizing the resist in the grooves to allow it creep up to the top end of the sloped surface of the grooves.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12277376A JPS5348477A (en) | 1976-10-15 | 1976-10-15 | Formation method of photoresist mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12277376A JPS5348477A (en) | 1976-10-15 | 1976-10-15 | Formation method of photoresist mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5348477A true JPS5348477A (en) | 1978-05-01 |
Family
ID=14844247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12277376A Pending JPS5348477A (en) | 1976-10-15 | 1976-10-15 | Formation method of photoresist mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5348477A (en) |
-
1976
- 1976-10-15 JP JP12277376A patent/JPS5348477A/en active Pending
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