JPS5333582A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5333582A JPS5333582A JP10779776A JP10779776A JPS5333582A JP S5333582 A JPS5333582 A JP S5333582A JP 10779776 A JP10779776 A JP 10779776A JP 10779776 A JP10779776 A JP 10779776A JP S5333582 A JPS5333582 A JP S5333582A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- clean
- structural body
- parts formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51107797A JPS6019146B2 (en) | 1976-09-10 | 1976-09-10 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51107797A JPS6019146B2 (en) | 1976-09-10 | 1976-09-10 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5333582A true JPS5333582A (en) | 1978-03-29 |
JPS6019146B2 JPS6019146B2 (en) | 1985-05-14 |
Family
ID=14468264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51107797A Expired JPS6019146B2 (en) | 1976-09-10 | 1976-09-10 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6019146B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5087781A (en) * | 1973-12-07 | 1975-07-15 |
-
1976
- 1976-09-10 JP JP51107797A patent/JPS6019146B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5087781A (en) * | 1973-12-07 | 1975-07-15 |
Also Published As
Publication number | Publication date |
---|---|
JPS6019146B2 (en) | 1985-05-14 |
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