JPS5329076A - Plasma treating apparatus of semiconductor substrates - Google Patents

Plasma treating apparatus of semiconductor substrates

Info

Publication number
JPS5329076A
JPS5329076A JP10323876A JP10323876A JPS5329076A JP S5329076 A JPS5329076 A JP S5329076A JP 10323876 A JP10323876 A JP 10323876A JP 10323876 A JP10323876 A JP 10323876A JP S5329076 A JPS5329076 A JP S5329076A
Authority
JP
Japan
Prior art keywords
treating apparatus
semiconductor substrates
plasma treating
discharge
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10323876A
Other languages
English (en)
Other versions
JPS543345B2 (ja
Inventor
Kazuo Niwa
Masahiro Shibagaki
Yasuhiro Horiike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10323876A priority Critical patent/JPS5329076A/ja
Priority to US05/828,919 priority patent/US4175235A/en
Publication of JPS5329076A publication Critical patent/JPS5329076A/ja
Publication of JPS543345B2 publication Critical patent/JPS543345B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP10323876A 1976-08-31 1976-08-31 Plasma treating apparatus of semiconductor substrates Granted JPS5329076A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10323876A JPS5329076A (en) 1976-08-31 1976-08-31 Plasma treating apparatus of semiconductor substrates
US05/828,919 US4175235A (en) 1976-08-31 1977-08-29 Apparatus for the plasma treatment of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10323876A JPS5329076A (en) 1976-08-31 1976-08-31 Plasma treating apparatus of semiconductor substrates

Publications (2)

Publication Number Publication Date
JPS5329076A true JPS5329076A (en) 1978-03-17
JPS543345B2 JPS543345B2 (ja) 1979-02-21

Family

ID=14348856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10323876A Granted JPS5329076A (en) 1976-08-31 1976-08-31 Plasma treating apparatus of semiconductor substrates

Country Status (2)

Country Link
US (1) US4175235A (ja)
JP (1) JPS5329076A (ja)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4330384A (en) * 1978-10-27 1982-05-18 Hitachi, Ltd. Process for plasma etching
JPS55131175A (en) * 1979-03-30 1980-10-11 Toshiba Corp Surface treatment apparatus with microwave plasma
JPS5740586A (en) * 1980-08-22 1982-03-06 Toshiba Corp Treatment of fluorescent substance and its device
JPH0122427Y2 (ja) * 1980-11-28 1989-07-04
JPS57133618A (en) * 1981-02-10 1982-08-18 Matsushita Electric Ind Co Ltd Metallized film capacitor
JPS57133619A (en) * 1981-02-10 1982-08-18 Matsushita Electric Ind Co Ltd Metallized film capacitor
US4368092A (en) * 1981-04-02 1983-01-11 The Perkin-Elmer Corporation Apparatus for the etching for semiconductor devices
DE3269040D1 (en) * 1981-04-02 1986-03-27 Perkin Elmer Corp Discharge system for plasma processing
AU548915B2 (en) * 1983-02-25 1986-01-09 Toyota Jidosha Kabushiki Kaisha Plasma treatment
JPS60124907A (ja) * 1983-12-12 1985-07-04 株式会社指月電機製作所 樹脂封入コンデンサの製造方法
US4563367A (en) * 1984-05-29 1986-01-07 Applied Materials, Inc. Apparatus and method for high rate deposition and etching
US4673456A (en) * 1985-09-17 1987-06-16 Machine Technology, Inc. Microwave apparatus for generating plasma afterglows
US5007983A (en) * 1988-01-29 1991-04-16 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Etching method for photoresists or polymers
US4918031A (en) * 1988-12-28 1990-04-17 American Telephone And Telegraph Company,At&T Bell Laboratories Processes depending on plasma generation using a helical resonator
JPH0432738Y2 (ja) * 1988-12-29 1992-08-06
US4888088A (en) * 1989-03-06 1989-12-19 Tegal Corporation Ignitor for a microwave sustained plasma
US4946549A (en) * 1989-10-27 1990-08-07 At&T Bell Laboratories Method for fabricating or modifying an article comprising the removal of a polymer coating
DE4122452C2 (de) * 1991-07-06 1993-10-28 Schott Glaswerke Verfahren und Vorrichtung zum Zünden von CVD-Plasmen
JPH0864559A (ja) * 1994-06-14 1996-03-08 Fsi Internatl Inc 基板面から不要な物質を除去する方法
US5534107A (en) * 1994-06-14 1996-07-09 Fsi International UV-enhanced dry stripping of silicon nitride films
US6124211A (en) * 1994-06-14 2000-09-26 Fsi International, Inc. Cleaning method
US5635102A (en) 1994-09-28 1997-06-03 Fsi International Highly selective silicon oxide etching method
US5961851A (en) * 1996-04-02 1999-10-05 Fusion Systems Corporation Microwave plasma discharge device
US6015761A (en) * 1996-06-26 2000-01-18 Applied Materials, Inc. Microwave-activated etching of dielectric layers
JP2002533868A (ja) * 1997-10-14 2002-10-08 アドバンスト・エナジー・インダストリーズ・インコーポレイテッド 早い電圧増加によるプラズマ点火を目的としたシステム
US6060400A (en) * 1998-03-26 2000-05-09 The Research Foundation Of State University Of New York Highly selective chemical dry etching of silicon nitride over silicon and silicon dioxide
US6696662B2 (en) 2000-05-25 2004-02-24 Advanced Energy Industries, Inc. Methods and apparatus for plasma processing
ITMI20050585A1 (it) * 2005-04-07 2006-10-08 Francesco Cino Matacotta Apparato e processo per la generazione accelerazione e propagazione di fasci di elettroni e plasma

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1104935A (en) * 1964-05-08 1968-03-06 Standard Telephones Cables Ltd Improvements in or relating to a method of forming a layer of an inorganic compound
GB1139608A (en) * 1966-10-12 1969-01-08 British Titan Products Plasma generator
US3551312A (en) * 1968-05-20 1970-12-29 Bell Telephone Labor Inc Vacuum evaporation deposition of group iii-a metal nitrides
JPS5211175A (en) * 1975-07-18 1977-01-27 Toshiba Corp Activated gas reacting apparatus

Also Published As

Publication number Publication date
JPS543345B2 (ja) 1979-02-21
US4175235A (en) 1979-11-20

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