JPS5328266A - Method of producing multilayer ceramic substrate - Google Patents

Method of producing multilayer ceramic substrate

Info

Publication number
JPS5328266A
JPS5328266A JP9674276A JP9674276A JPS5328266A JP S5328266 A JPS5328266 A JP S5328266A JP 9674276 A JP9674276 A JP 9674276A JP 9674276 A JP9674276 A JP 9674276A JP S5328266 A JPS5328266 A JP S5328266A
Authority
JP
Japan
Prior art keywords
ceramic substrate
multilayer ceramic
producing multilayer
producing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9674276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5625038B2 (enExample
Inventor
Kouichi Niwa
Teruo Murase
Masatoshi Fujimori
Kiyouhei Murakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9674276A priority Critical patent/JPS5328266A/ja
Priority to DE2736055A priority patent/DE2736055C3/de
Publication of JPS5328266A publication Critical patent/JPS5328266A/ja
Priority to US05/933,073 priority patent/US4237606A/en
Publication of JPS5625038B2 publication Critical patent/JPS5625038B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
    • H05K3/4605—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated made from inorganic insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4664—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders
    • H05K3/4667—Adding a circuit layer by thick film methods, e.g. printing techniques or by other techniques for making conductive patterns by using pastes, inks or powders characterized by using an inorganic intermediate insulating layer
    • H10W70/635—
    • H10W70/65—
    • H10W70/68—
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092—Dispersed materials, e.g. conductive pastes or inks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0175—Inorganic, non-metallic layer, e.g. resist or dielectric for printed capacitor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0302—Properties and characteristics in general
    • H05K2201/0317—Thin film conductor layer; Thin film passive component
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06—Lamination
    • H05K2203/061—Lamination of previously made multilayered subassemblies
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/002—Etching of the substrate by chemical or physical means by liquid chemical etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0029—Etching of the substrate by chemical or physical means by laser ablation of inorganic insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4688—Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126—Assembling bases

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Laminated Bodies (AREA)
JP9674276A 1976-08-13 1976-08-13 Method of producing multilayer ceramic substrate Granted JPS5328266A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP9674276A JPS5328266A (en) 1976-08-13 1976-08-13 Method of producing multilayer ceramic substrate
DE2736055A DE2736055C3 (de) 1976-08-13 1977-08-10 Mehrschichtige gedruckte Schaltung und Verfahren zum Herstellen der mehrschichtigen gedruckten Schaltung
US05/933,073 US4237606A (en) 1976-08-13 1978-08-11 Method of manufacturing multilayer ceramic board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9674276A JPS5328266A (en) 1976-08-13 1976-08-13 Method of producing multilayer ceramic substrate

Publications (2)

Publication Number Publication Date
JPS5328266A true JPS5328266A (en) 1978-03-16
JPS5625038B2 JPS5625038B2 (enExample) 1981-06-10

Family

ID=14173137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9674276A Granted JPS5328266A (en) 1976-08-13 1976-08-13 Method of producing multilayer ceramic substrate

Country Status (3)

Country Link
US (1) US4237606A (enExample)
JP (1) JPS5328266A (enExample)
DE (1) DE2736055C3 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873193A (ja) * 1981-10-28 1983-05-02 株式会社日立製作所 多層配線基板の製造方法
JPH04226097A (ja) * 1991-05-10 1992-08-14 Hitachi Ltd 多層配線基板の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2964342D1 (en) * 1978-06-23 1983-01-27 Ibm Multi-layer dielectric substrate
JPS55130198A (en) * 1979-03-30 1980-10-08 Hitachi Ltd Hybrid integrated circuit board for tuner
US4331700A (en) * 1979-11-30 1982-05-25 Rca Corporation Method of making a composite substrate
US4296272A (en) * 1979-11-30 1981-10-20 Rca Corporation Composite substrate
JPS57184296A (en) * 1981-05-09 1982-11-12 Hitachi Ltd Ceramic circuit board
US4407007A (en) * 1981-05-28 1983-09-27 International Business Machines Corporation Process and structure for minimizing delamination in the fabrication of multi-layer ceramic substrate
JPS582054A (ja) * 1981-06-26 1983-01-07 Fujitsu Ltd 半導体装置
JPS5996340U (ja) * 1982-12-20 1984-06-29 スズキ株式会社 エンジン用シリンダブロツクのオイル通路
US4598470A (en) * 1983-06-20 1986-07-08 International Business Machines Corporation Method for providing improved electrical and mechanical connection between I/O pin and transverse via substrate
JPS6047495A (ja) * 1983-08-25 1985-03-14 株式会社日立製作所 セラミツク配線基板
KR900004379B1 (ko) * 1983-09-16 1990-06-23 마쯔시다덴기산교 가부시기가이샤 세라믹 다층기판 및 그 제조방법
US4539058A (en) * 1983-12-12 1985-09-03 International Business Machines Corporation Forming multilayer ceramic substrates from large area green sheets
JPS60208886A (ja) * 1984-03-31 1985-10-21 株式会社東芝 電子部品の製造方法
US4712161A (en) * 1985-03-25 1987-12-08 Olin Corporation Hybrid and multi-layer circuitry
US4677254A (en) * 1985-08-07 1987-06-30 International Business Machines Corporation Process for minimizing distortion in multilayer ceramic substrates and the intermediate unsintered green ceramic substrate produced thereby
US4880684A (en) * 1988-03-11 1989-11-14 International Business Machines Corporation Sealing and stress relief layers and use thereof
WO1989011209A1 (en) * 1988-05-11 1989-11-16 Ariel Electronics, Inc. Circuit writer
US5099090A (en) * 1988-05-11 1992-03-24 Ariel Electronics, Inc. Circuit writer
US5459634A (en) * 1989-05-15 1995-10-17 Rogers Corporation Area array interconnect device and method of manufacture thereof
DE4030055A1 (de) * 1990-09-22 1992-03-26 Bosch Gmbh Robert Verfahren zum herstellen einer schaltung
US5282312A (en) * 1991-12-31 1994-02-01 Tessera, Inc. Multi-layer circuit construction methods with customization features
US5544017A (en) * 1992-08-05 1996-08-06 Fujitsu Limited Multichip module substrate
US5360948A (en) * 1992-08-14 1994-11-01 Ncr Corporation Via programming for multichip modules
JPH06334301A (ja) * 1993-05-19 1994-12-02 Murata Mfg Co Ltd スル−ホ−ル配線基板の加工方法
TW276356B (enExample) * 1994-06-24 1996-05-21 Ibm
JPH08322127A (ja) * 1995-05-23 1996-12-03 Sumitomo Wiring Syst Ltd 電気接続箱に収容するバスバーと絶縁板の積層構造
US5700549A (en) * 1996-06-24 1997-12-23 International Business Machines Corporation Structure to reduce stress in multilayer ceramic substrates
US7732732B2 (en) * 1996-11-20 2010-06-08 Ibiden Co., Ltd. Laser machining apparatus, and apparatus and method for manufacturing a multilayered printed wiring board
US6016005A (en) * 1998-02-09 2000-01-18 Cellarosi; Mario J. Multilayer, high density micro circuit module and method of manufacturing same
US6284079B1 (en) 1999-03-03 2001-09-04 International Business Machines Corporation Method and structure to reduce low force pin pull failures in ceramic substrates
US6675469B1 (en) * 1999-08-11 2004-01-13 Tessera, Inc. Vapor phase connection techniques
US6252761B1 (en) * 1999-09-15 2001-06-26 National Semiconductor Corporation Embedded multi-layer ceramic capacitor in a low-temperature con-fired ceramic (LTCC) substrate
JP3407710B2 (ja) * 2000-04-26 2003-05-19 株式会社村田製作所 誘電体線路の製造方法
US6408511B1 (en) * 2000-08-21 2002-06-25 National Semiconductor, Inc. Method of creating an enhanced BGA attachment in a low-temperature co-fired ceramic (LTCC) substrate
US6627020B2 (en) * 2001-08-31 2003-09-30 International Business Machines Corporation Method for sinter distortion control
US6796637B2 (en) * 2002-05-28 2004-09-28 Ngk Insulators, Ltd. Piezoelectric/electrostrictive film type actuator and method for manufacturing the same
JP4421910B2 (ja) * 2004-01-29 2010-02-24 日本碍子株式会社 熱処理用トレー及びそれを用いたセラミック製品の製造方法
CN1906715B (zh) * 2004-12-20 2010-06-16 株式会社村田制作所 层压陶瓷电子元件及其制造方法
JP4843291B2 (ja) * 2005-10-18 2011-12-21 東洋アルミニウム株式会社 アルミニウムペースト組成物およびそれを用いた太陽電池素子
DE102009029485A1 (de) * 2009-09-15 2011-03-24 Robert Bosch Gmbh Verfahren zur Herstellung eines Keramikbauteils, Keramikbauteil und Bauteilanordnung
KR101153680B1 (ko) * 2009-09-18 2012-06-18 삼성전기주식회사 인쇄회로기판의 제조 방법
CN114634366B (zh) * 2022-02-17 2023-06-30 福建闽航电子有限公司 一种基于纤维氧化铝的陶瓷管壳制备方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
JPS50111A (enExample) * 1973-05-11 1975-01-06
JPS509340A (enExample) * 1973-05-21 1975-01-30

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US3332137A (en) * 1964-09-28 1967-07-25 Rca Corp Method of isolating chips of a wafer of semiconductor material
GB1254101A (en) * 1967-11-17 1971-11-17 Nat Res Dev Improvements in or relating to microcircuit insulation
US4030004A (en) * 1971-04-16 1977-06-14 Nl Industries, Inc. Dielectric ceramic matrices with end barriers
US3772748A (en) * 1971-04-16 1973-11-20 Nl Industries Inc Method for forming electrodes and conductors
US3968193A (en) * 1971-08-27 1976-07-06 International Business Machines Corporation Firing process for forming a multilayer glass-metal module
US3798762A (en) * 1972-08-14 1974-03-26 Us Army Circuit board processing
US3948706A (en) * 1973-12-13 1976-04-06 International Business Machines Corporation Method for metallizing ceramic green sheets
US3999004A (en) * 1974-09-27 1976-12-21 International Business Machines Corporation Multilayer ceramic substrate structure
JPS5173086A (ja) * 1974-12-20 1976-06-24 Eiwa Chem Ind Funmatsujokaryugomusoseibutsuomochiitayukazainoseizohoho
FR2296988A1 (fr) * 1974-12-31 1976-07-30 Ibm France Perfectionnement aux procedes de fabrication d'un module de circuits multicouches en ceramique

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50111A (enExample) * 1973-05-11 1975-01-06
JPS509340A (enExample) * 1973-05-21 1975-01-30

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873193A (ja) * 1981-10-28 1983-05-02 株式会社日立製作所 多層配線基板の製造方法
JPH04226097A (ja) * 1991-05-10 1992-08-14 Hitachi Ltd 多層配線基板の製造方法

Also Published As

Publication number Publication date
US4237606A (en) 1980-12-09
DE2736055A1 (de) 1978-02-16
JPS5625038B2 (enExample) 1981-06-10
DE2736055B2 (de) 1981-01-29
DE2736055C3 (de) 1981-10-15

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