JPS53148965A - Electrode formation method for semiconductor device - Google Patents

Electrode formation method for semiconductor device

Info

Publication number
JPS53148965A
JPS53148965A JP6328077A JP6328077A JPS53148965A JP S53148965 A JPS53148965 A JP S53148965A JP 6328077 A JP6328077 A JP 6328077A JP 6328077 A JP6328077 A JP 6328077A JP S53148965 A JPS53148965 A JP S53148965A
Authority
JP
Japan
Prior art keywords
semiconductor device
formation method
electrode formation
electrode
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6328077A
Other languages
Japanese (ja)
Inventor
Yasumichi Yasuda
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6328077A priority Critical patent/JPS53148965A/en
Publication of JPS53148965A publication Critical patent/JPS53148965A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To produce a thick Al electrode featuring a high-reliability by having a lift-off through utilization of the gold adhesion force difference against Si and SiO2.
COPYRIGHT: (C)1978,JPO&Japio
JP6328077A 1977-06-01 1977-06-01 Electrode formation method for semiconductor device Pending JPS53148965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6328077A JPS53148965A (en) 1977-06-01 1977-06-01 Electrode formation method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6328077A JPS53148965A (en) 1977-06-01 1977-06-01 Electrode formation method for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53148965A true JPS53148965A (en) 1978-12-26

Family

ID=13224741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6328077A Pending JPS53148965A (en) 1977-06-01 1977-06-01 Electrode formation method for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53148965A (en)

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