JPS53142180A - Pattern transcribing method and transcribing intermediate body - Google Patents
Pattern transcribing method and transcribing intermediate bodyInfo
- Publication number
- JPS53142180A JPS53142180A JP5645077A JP5645077A JPS53142180A JP S53142180 A JPS53142180 A JP S53142180A JP 5645077 A JP5645077 A JP 5645077A JP 5645077 A JP5645077 A JP 5645077A JP S53142180 A JPS53142180 A JP S53142180A
- Authority
- JP
- Japan
- Prior art keywords
- transcribing
- intermediate body
- pattern
- transcribed
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5645077A JPS53142180A (en) | 1977-05-18 | 1977-05-18 | Pattern transcribing method and transcribing intermediate body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5645077A JPS53142180A (en) | 1977-05-18 | 1977-05-18 | Pattern transcribing method and transcribing intermediate body |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53142180A true JPS53142180A (en) | 1978-12-11 |
JPS568493B2 JPS568493B2 (ja) | 1981-02-24 |
Family
ID=13027426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5645077A Granted JPS53142180A (en) | 1977-05-18 | 1977-05-18 | Pattern transcribing method and transcribing intermediate body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142180A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56501183A (ja) * | 1979-09-24 | 1981-08-20 | ||
JPS56167330A (en) * | 1980-05-29 | 1981-12-23 | Nippon Telegr & Teleph Corp <Ntt> | Fine pattern forming method |
JPS5892223A (ja) * | 1981-11-27 | 1983-06-01 | Matsushita Electronics Corp | レジストパタ−ン形成方法 |
JPS5895383U (ja) * | 1981-12-22 | 1983-06-28 | ヤンマー農機株式会社 | 無限軌道帯を備えた農作業機のクロ−ラ位置確認装置 |
JPS58154285A (ja) * | 1982-03-10 | 1983-09-13 | Agency Of Ind Science & Technol | 回折格子の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6341598U (ja) * | 1986-09-03 | 1988-03-18 |
-
1977
- 1977-05-18 JP JP5645077A patent/JPS53142180A/ja active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56501183A (ja) * | 1979-09-24 | 1981-08-20 | ||
JPS56167330A (en) * | 1980-05-29 | 1981-12-23 | Nippon Telegr & Teleph Corp <Ntt> | Fine pattern forming method |
JPS6230493B2 (ja) * | 1980-05-29 | 1987-07-02 | Nippon Telegraph & Telephone | |
JPS5892223A (ja) * | 1981-11-27 | 1983-06-01 | Matsushita Electronics Corp | レジストパタ−ン形成方法 |
JPS5895383U (ja) * | 1981-12-22 | 1983-06-28 | ヤンマー農機株式会社 | 無限軌道帯を備えた農作業機のクロ−ラ位置確認装置 |
JPS58154285A (ja) * | 1982-03-10 | 1983-09-13 | Agency Of Ind Science & Technol | 回折格子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS568493B2 (ja) | 1981-02-24 |
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