JPS53142180A - Pattern transcribing method and transcribing intermediate body - Google Patents

Pattern transcribing method and transcribing intermediate body

Info

Publication number
JPS53142180A
JPS53142180A JP5645077A JP5645077A JPS53142180A JP S53142180 A JPS53142180 A JP S53142180A JP 5645077 A JP5645077 A JP 5645077A JP 5645077 A JP5645077 A JP 5645077A JP S53142180 A JPS53142180 A JP S53142180A
Authority
JP
Japan
Prior art keywords
transcribing
intermediate body
pattern
transcribed
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5645077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS568493B2 (enExample
Inventor
Masanori Komuro
Shigeo Okayama
Nobufumi Atoda
Kyuzo Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5645077A priority Critical patent/JPS53142180A/ja
Publication of JPS53142180A publication Critical patent/JPS53142180A/ja
Publication of JPS568493B2 publication Critical patent/JPS568493B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5645077A 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body Granted JPS53142180A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5645077A JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5645077A JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Publications (2)

Publication Number Publication Date
JPS53142180A true JPS53142180A (en) 1978-12-11
JPS568493B2 JPS568493B2 (enExample) 1981-02-24

Family

ID=13027426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5645077A Granted JPS53142180A (en) 1977-05-18 1977-05-18 Pattern transcribing method and transcribing intermediate body

Country Status (1)

Country Link
JP (1) JPS53142180A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501183A (enExample) * 1979-09-24 1981-08-20
JPS56167330A (en) * 1980-05-29 1981-12-23 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS5892223A (ja) * 1981-11-27 1983-06-01 Matsushita Electronics Corp レジストパタ−ン形成方法
JPS5895383U (ja) * 1981-12-22 1983-06-28 ヤンマー農機株式会社 無限軌道帯を備えた農作業機のクロ−ラ位置確認装置
JPS58154285A (ja) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol 回折格子の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6341598U (enExample) * 1986-09-03 1988-03-18

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56501183A (enExample) * 1979-09-24 1981-08-20
JPS56167330A (en) * 1980-05-29 1981-12-23 Nippon Telegr & Teleph Corp <Ntt> Fine pattern forming method
JPS5892223A (ja) * 1981-11-27 1983-06-01 Matsushita Electronics Corp レジストパタ−ン形成方法
JPS5895383U (ja) * 1981-12-22 1983-06-28 ヤンマー農機株式会社 無限軌道帯を備えた農作業機のクロ−ラ位置確認装置
JPS58154285A (ja) * 1982-03-10 1983-09-13 Agency Of Ind Science & Technol 回折格子の製造方法

Also Published As

Publication number Publication date
JPS568493B2 (enExample) 1981-02-24

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