JPS53137672A - Arrangement graph drawing circuit - Google Patents
Arrangement graph drawing circuitInfo
- Publication number
- JPS53137672A JPS53137672A JP5245077A JP5245077A JPS53137672A JP S53137672 A JPS53137672 A JP S53137672A JP 5245077 A JP5245077 A JP 5245077A JP 5245077 A JP5245077 A JP 5245077A JP S53137672 A JPS53137672 A JP S53137672A
- Authority
- JP
- Japan
- Prior art keywords
- arrangement
- drawing circuit
- graph drawing
- arrangement graph
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5245077A JPS53137672A (en) | 1977-05-06 | 1977-05-06 | Arrangement graph drawing circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5245077A JPS53137672A (en) | 1977-05-06 | 1977-05-06 | Arrangement graph drawing circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53137672A true JPS53137672A (en) | 1978-12-01 |
JPS5613378B2 JPS5613378B2 (ja) | 1981-03-27 |
Family
ID=12915051
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5245077A Granted JPS53137672A (en) | 1977-05-06 | 1977-05-06 | Arrangement graph drawing circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53137672A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5577144A (en) * | 1978-12-07 | 1980-06-10 | Jeol Ltd | Electron beam exposure method |
JPS62122214A (ja) * | 1985-11-22 | 1987-06-03 | Toshiba Mach Co Ltd | 電子ビーム描画装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52119182A (en) * | 1976-03-31 | 1977-10-06 | Fujitsu Ltd | Electron beam exposure equipment |
-
1977
- 1977-05-06 JP JP5245077A patent/JPS53137672A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52119182A (en) * | 1976-03-31 | 1977-10-06 | Fujitsu Ltd | Electron beam exposure equipment |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5577144A (en) * | 1978-12-07 | 1980-06-10 | Jeol Ltd | Electron beam exposure method |
JPS62122214A (ja) * | 1985-11-22 | 1987-06-03 | Toshiba Mach Co Ltd | 電子ビーム描画装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5613378B2 (ja) | 1981-03-27 |
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