JPS53131770A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53131770A
JPS53131770A JP4655277A JP4655277A JPS53131770A JP S53131770 A JPS53131770 A JP S53131770A JP 4655277 A JP4655277 A JP 4655277A JP 4655277 A JP4655277 A JP 4655277A JP S53131770 A JPS53131770 A JP S53131770A
Authority
JP
Japan
Prior art keywords
film
production
semiconductor device
windows
psg film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4655277A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Shinpei Tanaka
Atsushi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4655277A priority Critical patent/JPS53131770A/en
Publication of JPS53131770A publication Critical patent/JPS53131770A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To prevent the formation of SiO2 film despite heat-treatment in a wet oxidative atmosphere and facilitate exposing of substrate surface by beforehand providing Si3N4 film in windows at the time of opening electrode contact windows in PSG film or G-PSG film.
COPYRIGHT: (C)1978,JPO&Japio
JP4655277A 1977-04-21 1977-04-21 Production of semiconductor device Pending JPS53131770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4655277A JPS53131770A (en) 1977-04-21 1977-04-21 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4655277A JPS53131770A (en) 1977-04-21 1977-04-21 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53131770A true JPS53131770A (en) 1978-11-16

Family

ID=12750473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4655277A Pending JPS53131770A (en) 1977-04-21 1977-04-21 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53131770A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158931A (en) * 1982-03-16 1983-09-21 Nec Corp Manufacture of semiconductor device
JPS6218040A (en) * 1985-07-17 1987-01-27 Matsushita Electronics Corp Flattening of phosphosilicate glass film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158931A (en) * 1982-03-16 1983-09-21 Nec Corp Manufacture of semiconductor device
JPH0414497B2 (en) * 1982-03-16 1992-03-13 Nippon Electric Co
JPS6218040A (en) * 1985-07-17 1987-01-27 Matsushita Electronics Corp Flattening of phosphosilicate glass film

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