JPS53131770A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53131770A JPS53131770A JP4655277A JP4655277A JPS53131770A JP S53131770 A JPS53131770 A JP S53131770A JP 4655277 A JP4655277 A JP 4655277A JP 4655277 A JP4655277 A JP 4655277A JP S53131770 A JPS53131770 A JP S53131770A
- Authority
- JP
- Japan
- Prior art keywords
- film
- production
- semiconductor device
- windows
- psg film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To prevent the formation of SiO2 film despite heat-treatment in a wet oxidative atmosphere and facilitate exposing of substrate surface by beforehand providing Si3N4 film in windows at the time of opening electrode contact windows in PSG film or G-PSG film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4655277A JPS53131770A (en) | 1977-04-21 | 1977-04-21 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4655277A JPS53131770A (en) | 1977-04-21 | 1977-04-21 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53131770A true JPS53131770A (en) | 1978-11-16 |
Family
ID=12750473
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4655277A Pending JPS53131770A (en) | 1977-04-21 | 1977-04-21 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53131770A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158931A (en) * | 1982-03-16 | 1983-09-21 | Nec Corp | Manufacture of semiconductor device |
JPS6218040A (en) * | 1985-07-17 | 1987-01-27 | Matsushita Electronics Corp | Flattening of phosphosilicate glass film |
-
1977
- 1977-04-21 JP JP4655277A patent/JPS53131770A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158931A (en) * | 1982-03-16 | 1983-09-21 | Nec Corp | Manufacture of semiconductor device |
JPH0414497B2 (en) * | 1982-03-16 | 1992-03-13 | Nippon Electric Co | |
JPS6218040A (en) * | 1985-07-17 | 1987-01-27 | Matsushita Electronics Corp | Flattening of phosphosilicate glass film |
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