JPS53130973A - Manufacture for silicon thin film - Google Patents

Manufacture for silicon thin film

Info

Publication number
JPS53130973A
JPS53130973A JP4513877A JP4513877A JPS53130973A JP S53130973 A JPS53130973 A JP S53130973A JP 4513877 A JP4513877 A JP 4513877A JP 4513877 A JP4513877 A JP 4513877A JP S53130973 A JPS53130973 A JP S53130973A
Authority
JP
Japan
Prior art keywords
manufacture
thin film
silicon thin
eutetic
separating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4513877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5633853B2 (enrdf_load_stackoverflow
Inventor
Takeshi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4513877A priority Critical patent/JPS53130973A/ja
Publication of JPS53130973A publication Critical patent/JPS53130973A/ja
Publication of JPS5633853B2 publication Critical patent/JPS5633853B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP4513877A 1977-04-21 1977-04-21 Manufacture for silicon thin film Granted JPS53130973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4513877A JPS53130973A (en) 1977-04-21 1977-04-21 Manufacture for silicon thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4513877A JPS53130973A (en) 1977-04-21 1977-04-21 Manufacture for silicon thin film

Publications (2)

Publication Number Publication Date
JPS53130973A true JPS53130973A (en) 1978-11-15
JPS5633853B2 JPS5633853B2 (enrdf_load_stackoverflow) 1981-08-06

Family

ID=12710911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4513877A Granted JPS53130973A (en) 1977-04-21 1977-04-21 Manufacture for silicon thin film

Country Status (1)

Country Link
JP (1) JPS53130973A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955012A (ja) * 1982-09-24 1984-03-29 Mitsubishi Chem Ind Ltd アモルフアスシリコン半導体材料用基板

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431854U (enrdf_load_stackoverflow) * 1990-07-09 1992-03-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140788A (en) * 1974-07-31 1976-04-05 Commissariat Energie Atomique Kodenchioyobi sonoseizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140788A (en) * 1974-07-31 1976-04-05 Commissariat Energie Atomique Kodenchioyobi sonoseizohoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5955012A (ja) * 1982-09-24 1984-03-29 Mitsubishi Chem Ind Ltd アモルフアスシリコン半導体材料用基板

Also Published As

Publication number Publication date
JPS5633853B2 (enrdf_load_stackoverflow) 1981-08-06

Similar Documents

Publication Publication Date Title
JPS5313424A (en) Photosensitive element of selenium for electronic photography
JPS53130973A (en) Manufacture for silicon thin film
JPS5280776A (en) Preparation of thin film silicon single crystal plate
JPS53130974A (en) Manufacture for silicon thin film
JPS53147700A (en) Method of producing silicon carbide substrate
JPS5373970A (en) Manufacture for semiconductor device
JPS5360177A (en) Photo mask
JPS5421274A (en) Chromium plate
JPS5349950A (en) Semiconductor device
JPS52141565A (en) Manufacture of semiconductor unit
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS5399881A (en) Manufacture of dielectric separation substrate
JPS547867A (en) Manufacture for semiconductor device
JPS5319847A (en) Electrochromic display element
JPS52124861A (en) Semiconductor element
JPS53117029A (en) Vibration insulation
JPS53118990A (en) Manufacture for resistor
JPS5424394A (en) Device for forming micro-groves
JPS542663A (en) Positioning method for mounting semiconductor chip
JPS53121464A (en) Glass constituent for semiconductor element surface stabilization
JPS52130280A (en) Color receiving tube
JPS53114674A (en) Manufacture for compound semiconductor device
JPS5295969A (en) Insulating base material
JPS53138280A (en) Manufacture of semiconductor device
JPS52116076A (en) Preparation of film for protecting surface of electronic parts