JPS53125763A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53125763A
JPS53125763A JP3954477A JP3954477A JPS53125763A JP S53125763 A JPS53125763 A JP S53125763A JP 3954477 A JP3954477 A JP 3954477A JP 3954477 A JP3954477 A JP 3954477A JP S53125763 A JPS53125763 A JP S53125763A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
thorugh
tilt
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3954477A
Other languages
Japanese (ja)
Inventor
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3954477A priority Critical patent/JPS53125763A/en
Publication of JPS53125763A publication Critical patent/JPS53125763A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To make fine the source and drain area and to prevent stepping out of electrodes, by forming electrode windows so that tilt is made, thorugh laminating different insulating films.
COPYRIGHT: (C)1978,JPO&Japio
JP3954477A 1977-04-08 1977-04-08 Manufacture for semiconductor device Pending JPS53125763A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3954477A JPS53125763A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3954477A JPS53125763A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53125763A true JPS53125763A (en) 1978-11-02

Family

ID=12555985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3954477A Pending JPS53125763A (en) 1977-04-08 1977-04-08 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53125763A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097329B2 (en) 2006-06-30 2012-01-17 Casio Computer Co., Ltd. Thin film device having thin film elements and thin film pattern on thin film elements, and method of fabricating the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097329B2 (en) 2006-06-30 2012-01-17 Casio Computer Co., Ltd. Thin film device having thin film elements and thin film pattern on thin film elements, and method of fabricating the same

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