JPS53119678A - Exposure method - Google Patents
Exposure methodInfo
- Publication number
- JPS53119678A JPS53119678A JP3399677A JP3399677A JPS53119678A JP S53119678 A JPS53119678 A JP S53119678A JP 3399677 A JP3399677 A JP 3399677A JP 3399677 A JP3399677 A JP 3399677A JP S53119678 A JPS53119678 A JP S53119678A
- Authority
- JP
- Japan
- Prior art keywords
- exposure method
- masks
- exposed
- exposing
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3399677A JPS53119678A (en) | 1977-03-29 | 1977-03-29 | Exposure method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3399677A JPS53119678A (en) | 1977-03-29 | 1977-03-29 | Exposure method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53119678A true JPS53119678A (en) | 1978-10-19 |
Family
ID=12402072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3399677A Pending JPS53119678A (en) | 1977-03-29 | 1977-03-29 | Exposure method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53119678A (ja) |
-
1977
- 1977-03-29 JP JP3399677A patent/JPS53119678A/ja active Pending
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Effective date: 20041130 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20050411 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
A02 | Decision of refusal |
Effective date: 20050524 Free format text: JAPANESE INTERMEDIATE CODE: A02 |