JPS53108766A - Vapor phase growth method of sos film - Google Patents
Vapor phase growth method of sos filmInfo
- Publication number
- JPS53108766A JPS53108766A JP2332277A JP2332277A JPS53108766A JP S53108766 A JPS53108766 A JP S53108766A JP 2332277 A JP2332277 A JP 2332277A JP 2332277 A JP2332277 A JP 2332277A JP S53108766 A JPS53108766 A JP S53108766A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- growth method
- phase growth
- sos
- sos film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2332277A JPS53108766A (en) | 1977-03-05 | 1977-03-05 | Vapor phase growth method of sos film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2332277A JPS53108766A (en) | 1977-03-05 | 1977-03-05 | Vapor phase growth method of sos film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53108766A true JPS53108766A (en) | 1978-09-21 |
Family
ID=12107343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2332277A Pending JPS53108766A (en) | 1977-03-05 | 1977-03-05 | Vapor phase growth method of sos film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53108766A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641899A (en) * | 1979-09-12 | 1981-04-18 | Nec Corp | Vapor phase growing method for sos film |
JPS57196794A (en) * | 1981-05-29 | 1982-12-02 | Nec Corp | Epitaxial growth method |
-
1977
- 1977-03-05 JP JP2332277A patent/JPS53108766A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5641899A (en) * | 1979-09-12 | 1981-04-18 | Nec Corp | Vapor phase growing method for sos film |
JPH0114199B2 (ja) * | 1979-09-12 | 1989-03-09 | Nippon Electric Co | |
JPS57196794A (en) * | 1981-05-29 | 1982-12-02 | Nec Corp | Epitaxial growth method |
JPS6229398B2 (ja) * | 1981-05-29 | 1987-06-25 | Nippon Electric Co |
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