JPS51114382A - Diguid phase epitanial crystal growth - Google Patents
Diguid phase epitanial crystal growthInfo
- Publication number
- JPS51114382A JPS51114382A JP3939575A JP3939575A JPS51114382A JP S51114382 A JPS51114382 A JP S51114382A JP 3939575 A JP3939575 A JP 3939575A JP 3939575 A JP3939575 A JP 3939575A JP S51114382 A JPS51114382 A JP S51114382A
- Authority
- JP
- Japan
- Prior art keywords
- epitanial
- diguid
- phase
- crystal growth
- asubstrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To carry out an epitaxial growth of 3-5 group semiconducter compound in liquid phase by means of a method free from gas etching on a surface of asubstrate.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3939575A JPS51114382A (en) | 1975-04-01 | 1975-04-01 | Diguid phase epitanial crystal growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3939575A JPS51114382A (en) | 1975-04-01 | 1975-04-01 | Diguid phase epitanial crystal growth |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51114382A true JPS51114382A (en) | 1976-10-08 |
JPS5318464B2 JPS5318464B2 (en) | 1978-06-15 |
Family
ID=12551798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3939575A Granted JPS51114382A (en) | 1975-04-01 | 1975-04-01 | Diguid phase epitanial crystal growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51114382A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS585511A (en) * | 1981-07-01 | 1983-01-12 | 株式会社 冨士精密製作所 | Double nut |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4839865A (en) * | 1971-09-21 | 1973-06-12 |
-
1975
- 1975-04-01 JP JP3939575A patent/JPS51114382A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4839865A (en) * | 1971-09-21 | 1973-06-12 |
Also Published As
Publication number | Publication date |
---|---|
JPS5318464B2 (en) | 1978-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51114382A (en) | Diguid phase epitanial crystal growth | |
JPS51114383A (en) | Liquid phase epitaxial crystal growth | |
JPS5249989A (en) | Growth method of liquid phase epitaxial | |
JPS53105371A (en) | Crystal growing method for potassium arsenide | |
JPS542670A (en) | Plasma etching method | |
JPS5210072A (en) | Method for growing epitaxial crystal | |
JPS5339855A (en) | Production of semiconductor device | |
JPS5436185A (en) | Etching method of gaas system compound semiconductor crystal | |
JPS5384457A (en) | Liquid-phase epitaxial growth method | |
JPS547861A (en) | Liquid phase epitaxial growth method | |
JPS5271388A (en) | Liquid phase epitaxial gorwth method | |
JPS5328374A (en) | Wafer production | |
JPS52135264A (en) | Liquid phase epitaxial growth method | |
JPS51123559A (en) | Production method of aerial phase growth wafer | |
JPS51147955A (en) | Method of growing semiconductor | |
JPS53132260A (en) | Production of semiconductor device | |
JPS5286775A (en) | Bebeling method for semiconductor substrate | |
JPS53104161A (en) | Crystal growth method | |
JPS53108766A (en) | Vapor phase growth method of sos film | |
JPS5227368A (en) | Selection etching method | |
JPS51140484A (en) | Method of etching wafer | |
JPS5230169A (en) | Method for etching of silicon crystal | |
JPS5376980A (en) | Gas phase growth method of compound semiconductor | |
JPS5384677A (en) | Liquid phase epitaxial growth method | |
JPS51138385A (en) | Method for liquid phase epitaxial growth |