JPS5299785A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5299785A JPS5299785A JP1669876A JP1669876A JPS5299785A JP S5299785 A JPS5299785 A JP S5299785A JP 1669876 A JP1669876 A JP 1669876A JP 1669876 A JP1669876 A JP 1669876A JP S5299785 A JPS5299785 A JP S5299785A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- make
- implanting
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1669876A JPS5299785A (en) | 1976-02-18 | 1976-02-18 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1669876A JPS5299785A (en) | 1976-02-18 | 1976-02-18 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5299785A true JPS5299785A (en) | 1977-08-22 |
| JPS6118346B2 JPS6118346B2 (https=) | 1986-05-12 |
Family
ID=11923503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1669876A Granted JPS5299785A (en) | 1976-02-18 | 1976-02-18 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5299785A (https=) |
-
1976
- 1976-02-18 JP JP1669876A patent/JPS5299785A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6118346B2 (https=) | 1986-05-12 |
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