JPS5289488A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5289488A
JPS5289488A JP492976A JP492976A JPS5289488A JP S5289488 A JPS5289488 A JP S5289488A JP 492976 A JP492976 A JP 492976A JP 492976 A JP492976 A JP 492976A JP S5289488 A JPS5289488 A JP S5289488A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
separation
scibing
cleaving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP492976A
Other languages
Japanese (ja)
Inventor
Yutaka Takeda
Satoshi Nakamura
Toshihiro Kono
Yasuharu Shima
Hisao Nakajima
Kazuhiro Kurata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP492976A priority Critical patent/JPS5289488A/en
Publication of JPS5289488A publication Critical patent/JPS5289488A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE: When processed semiconductor wafer is separated to each semiconductor element by cleaving or scibing, short-circuit of metal electrode is avoided by separating it after removing at least one part of viscous metallic layer in advance which is covering marginal part for separation which will be defect in separation operation.
COPYRIGHT: (C)1977,JPO&Japio
JP492976A 1976-01-21 1976-01-21 Production of semiconductor device Pending JPS5289488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP492976A JPS5289488A (en) 1976-01-21 1976-01-21 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP492976A JPS5289488A (en) 1976-01-21 1976-01-21 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5289488A true JPS5289488A (en) 1977-07-27

Family

ID=11597273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP492976A Pending JPS5289488A (en) 1976-01-21 1976-01-21 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5289488A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235587A (en) * 1985-08-08 1987-02-16 Sanyo Electric Co Ltd Light emitting element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5193174A (en) * 1975-02-12 1976-08-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5193174A (en) * 1975-02-12 1976-08-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6235587A (en) * 1985-08-08 1987-02-16 Sanyo Electric Co Ltd Light emitting element

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