JPS5754344A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5754344A JPS5754344A JP55130491A JP13049180A JPS5754344A JP S5754344 A JPS5754344 A JP S5754344A JP 55130491 A JP55130491 A JP 55130491A JP 13049180 A JP13049180 A JP 13049180A JP S5754344 A JPS5754344 A JP S5754344A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- region
- gate
- semiconductor device
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11803—Masterslice integrated circuits using field effect technology
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Logic Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To enhance the integration at the master slice method of semiconductor device by curtailing gaps between respective diffusion regions and wiring regions. CONSTITUTION:Thin oxide films of source and drain regions 41, 42, 43 of an MOSFET are removed remaining gate regions 20, 30, and diffusion of an impurity is performed to form master slices. At this time, the region 30 is divided into regions 31, 32, a polycrystalline silicon film 302 is formed on the region 32, for example, and after patterning is performed, an oxide film is formed on the surface thereof, and moreover when an aluminum film is evaporated to form electrodes 63, 64, the gate region 302 to be connected to the gate electrode 64 and the electrode 63 to constitute respective independent circuit parts are formed on the region 30.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55130491A JPS5754344A (en) | 1980-09-19 | 1980-09-19 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55130491A JPS5754344A (en) | 1980-09-19 | 1980-09-19 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5754344A true JPS5754344A (en) | 1982-03-31 |
Family
ID=15035524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55130491A Pending JPS5754344A (en) | 1980-09-19 | 1980-09-19 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5754344A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604460A (en) * | 1983-06-22 | 1985-01-10 | 株式会社日立製作所 | Truck for railway rolling stock |
-
1980
- 1980-09-19 JP JP55130491A patent/JPS5754344A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604460A (en) * | 1983-06-22 | 1985-01-10 | 株式会社日立製作所 | Truck for railway rolling stock |
JPH044185B2 (en) * | 1983-06-22 | 1992-01-27 |
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