JPS5287989A - Production of integrated circuits - Google Patents

Production of integrated circuits

Info

Publication number
JPS5287989A
JPS5287989A JP400976A JP400976A JPS5287989A JP S5287989 A JPS5287989 A JP S5287989A JP 400976 A JP400976 A JP 400976A JP 400976 A JP400976 A JP 400976A JP S5287989 A JPS5287989 A JP S5287989A
Authority
JP
Japan
Prior art keywords
parts
film
production
integrated circuits
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP400976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5758048B2 (xx
Inventor
Hideki Tsunetsugu
Akira Demura
Shinji Nagaoka
Tadashi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP400976A priority Critical patent/JPS5287989A/ja
Publication of JPS5287989A publication Critical patent/JPS5287989A/ja
Publication of JPS5758048B2 publication Critical patent/JPS5758048B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP400976A 1976-01-19 1976-01-19 Production of integrated circuits Granted JPS5287989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP400976A JPS5287989A (en) 1976-01-19 1976-01-19 Production of integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP400976A JPS5287989A (en) 1976-01-19 1976-01-19 Production of integrated circuits

Publications (2)

Publication Number Publication Date
JPS5287989A true JPS5287989A (en) 1977-07-22
JPS5758048B2 JPS5758048B2 (xx) 1982-12-08

Family

ID=11572964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP400976A Granted JPS5287989A (en) 1976-01-19 1976-01-19 Production of integrated circuits

Country Status (1)

Country Link
JP (1) JPS5287989A (xx)

Also Published As

Publication number Publication date
JPS5758048B2 (xx) 1982-12-08

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