Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP33977ApriorityCriticalpatent/JPS5386165A/en
Publication of JPS5386165ApublicationCriticalpatent/JPS5386165A/en
PURPOSE: To from electrode wirings of fine patterns by providing three layer films of an insulation film, PSG and resist on portions other than electrode forming parts, laminating a metal film of a specified relation to the thickness of said films thereafter removing the resists.
COPYRIGHT: (C)1978,JPO&Japio
JP33977A1977-01-071977-01-07Production of semiconductor device
PendingJPS5386165A
(en)