JPS5280777A - Vapor growth process - Google Patents

Vapor growth process

Info

Publication number
JPS5280777A
JPS5280777A JP15712275A JP15712275A JPS5280777A JP S5280777 A JPS5280777 A JP S5280777A JP 15712275 A JP15712275 A JP 15712275A JP 15712275 A JP15712275 A JP 15712275A JP S5280777 A JPS5280777 A JP S5280777A
Authority
JP
Japan
Prior art keywords
growth process
vapor growth
wafers
grow
keeping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15712275A
Other languages
Japanese (ja)
Other versions
JPS5642135B2 (en
Inventor
Isao Tachikake
Shunji Kumakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15712275A priority Critical patent/JPS5280777A/en
Publication of JPS5280777A publication Critical patent/JPS5280777A/en
Publication of JPS5642135B2 publication Critical patent/JPS5642135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45506—Turbulent flow
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To cause a film having a desired thickness to grow accurately and repeatedly on wafers in a vapor phase by inserting a tube for keeping the wafers at specified intervals.
JP15712275A 1975-12-27 1975-12-27 Vapor growth process Granted JPS5280777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15712275A JPS5280777A (en) 1975-12-27 1975-12-27 Vapor growth process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15712275A JPS5280777A (en) 1975-12-27 1975-12-27 Vapor growth process

Publications (2)

Publication Number Publication Date
JPS5280777A true JPS5280777A (en) 1977-07-06
JPS5642135B2 JPS5642135B2 (en) 1981-10-02

Family

ID=15642682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15712275A Granted JPS5280777A (en) 1975-12-27 1975-12-27 Vapor growth process

Country Status (1)

Country Link
JP (1) JPS5280777A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131380A (en) * 1973-04-18 1974-12-17
JPS5018470A (en) * 1973-05-31 1975-02-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49131380A (en) * 1973-04-18 1974-12-17
JPS5018470A (en) * 1973-05-31 1975-02-26

Also Published As

Publication number Publication date
JPS5642135B2 (en) 1981-10-02

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