JPS5276088A - System for inspecting defects of pattern having directivity - Google Patents

System for inspecting defects of pattern having directivity

Info

Publication number
JPS5276088A
JPS5276088A JP50151951A JP15195175A JPS5276088A JP S5276088 A JPS5276088 A JP S5276088A JP 50151951 A JP50151951 A JP 50151951A JP 15195175 A JP15195175 A JP 15195175A JP S5276088 A JPS5276088 A JP S5276088A
Authority
JP
Japan
Prior art keywords
directivity
pattern
inspecting defects
inspecting
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50151951A
Other languages
English (en)
Japanese (ja)
Other versions
JPS576521B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hidekazu Sekizawa
Masakata Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50151951A priority Critical patent/JPS5276088A/ja
Priority to US05/752,984 priority patent/US4153336A/en
Priority to DE2658239A priority patent/DE2658239C3/de
Priority to FR7638733A priority patent/FR2336662A1/fr
Priority to GB53702/76D priority patent/GB1563259A/en
Publication of JPS5276088A publication Critical patent/JPS5276088A/ja
Priority to US06/022,842 priority patent/US4299443A/en
Publication of JPS576521B2 publication Critical patent/JPS576521B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP50151951A 1975-12-22 1975-12-22 System for inspecting defects of pattern having directivity Granted JPS5276088A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP50151951A JPS5276088A (en) 1975-12-22 1975-12-22 System for inspecting defects of pattern having directivity
US05/752,984 US4153336A (en) 1975-12-22 1976-12-21 Optimized spatial filter for defect detection
DE2658239A DE2658239C3 (de) 1975-12-22 1976-12-22 Vorrichtung zur Feststellung von Fehlern in einem Muster bzw. einer Schablone
FR7638733A FR2336662A1 (fr) 1975-12-22 1976-12-22 Appareil de detection des defauts d'un motif geometrique
GB53702/76D GB1563259A (en) 1975-12-22 1976-12-22 Apparatus for detecting the defects of a pattern with directional characteristics
US06/022,842 US4299443A (en) 1975-12-22 1979-03-22 Apparatus for detecting the defects of a pattern with directional characteristics using a filter having arm sections of curved shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50151951A JPS5276088A (en) 1975-12-22 1975-12-22 System for inspecting defects of pattern having directivity

Publications (2)

Publication Number Publication Date
JPS5276088A true JPS5276088A (en) 1977-06-25
JPS576521B2 JPS576521B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-02-05

Family

ID=15529758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50151951A Granted JPS5276088A (en) 1975-12-22 1975-12-22 System for inspecting defects of pattern having directivity

Country Status (5)

Country Link
US (2) US4153336A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5276088A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2658239C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2336662A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1563259A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59934A (ja) * 1983-06-06 1984-01-06 Hitachi Ltd 欠陥検査装置
US4976520A (en) * 1988-09-09 1990-12-11 Grumman Aerospace Corporation Common path multichannel optical processor
US5742422A (en) * 1995-09-19 1998-04-21 Inspex, Inc. Adjustable fourier mask

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4308521A (en) * 1979-02-12 1981-12-29 The United States Of America As Represented By The Secretary Of The Air Force Multiple-invariant space-variant optical processing
JPS55124117A (en) * 1979-03-19 1980-09-25 Toshiba Corp Pattern inspecting apparatus
JPS6027964B2 (ja) * 1979-08-28 1985-07-02 工業技術院長 方向性ハイカツト空間周波数フイルタ
US4456375A (en) * 1981-11-23 1984-06-26 Discovision Associates Optical disc measurement by refraction
US4416538A (en) * 1981-12-07 1983-11-22 Aerodyne Research, Inc. Image enhancement
US4478481A (en) * 1982-02-12 1984-10-23 University Of Dayton Production of diffraction limited holographic images
DE3237826A1 (de) * 1982-10-12 1984-04-12 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur optischen erkennung von defekten auf reflektierenden oberflaechen von mit strukturen im (my)m-bereich versehenen substraten
DE3242219C1 (de) * 1982-11-15 1984-02-16 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Optisches Markenerkennungsgeraet
US4647154A (en) * 1983-07-29 1987-03-03 Quantum Diagnostics Ltd. Optical image processor
JPS61235118A (ja) * 1985-04-12 1986-10-20 Isamu Yamakawa 成形物選別装置
US4730930A (en) * 1986-06-24 1988-03-15 Technical Arts Corporation Scanning apparatus and method
US5078501A (en) * 1986-10-17 1992-01-07 E. I. Du Pont De Nemours And Company Method and apparatus for optically evaluating the conformance of unknown objects to predetermined characteristics
US5159474A (en) * 1986-10-17 1992-10-27 E. I. Du Pont De Nemours And Company Transform optical processing system
US4761057A (en) * 1987-02-19 1988-08-02 General Electric Company Aperture member for photo plotting apparatus
US4884083A (en) * 1988-10-03 1989-11-28 Xerox Corporation Printer compensated for vibration-generated scan line errors
US5063442A (en) * 1990-02-06 1991-11-05 E. I. Dupont De Nemours & Company Image converter
US7656504B1 (en) * 1990-08-21 2010-02-02 Nikon Corporation Projection exposure apparatus with luminous flux distribution
IL99823A0 (en) * 1990-11-16 1992-08-18 Orbot Instr Ltd Optical inspection method and apparatus
US6411377B1 (en) * 1991-04-02 2002-06-25 Hitachi, Ltd. Optical apparatus for defect and particle size inspection
US5177559A (en) * 1991-05-17 1993-01-05 International Business Machines Corporation Dark field imaging defect inspection system for repetitive pattern integrated circuits
DE69224514T2 (de) * 1992-03-23 1998-06-18 Erland Torbjoern Moelnlycke Sandstroem Verfahren und Vorrichtung zur Erzeugung eines Bildes
FR2707447B1 (fr) * 1993-07-09 1995-09-01 Thomson Csf Dispositif de visualisation couleurs.
US5642456A (en) * 1993-09-14 1997-06-24 Cogent Light Technologies, Inc. Light intensity attenuator for optical transmission systems
US5774222A (en) * 1994-10-07 1998-06-30 Hitachi, Ltd. Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected
US6084671A (en) * 1997-05-06 2000-07-04 Holcomb; Matthew J. Surface analysis using Gaussian beam profiles
TW571089B (en) * 2000-04-21 2004-01-11 Nikon Corp Defect testing apparatus and defect testing method
US8439520B2 (en) * 2010-10-21 2013-05-14 Rambus Delaware Llc Color-configurable lighting assembly
CN114264669B (zh) * 2022-03-03 2022-05-17 武汉精立电子技术有限公司 屏幕损伤缺陷检测方法、装置、设备及可读存储介质

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3560093A (en) * 1968-07-16 1971-02-02 Western Electric Co Superimposed common carrier mask inspection system
US3614232A (en) * 1968-11-25 1971-10-19 Ibm Pattern defect sensing using error free blocking spacial filter
US3658420A (en) * 1969-12-10 1972-04-25 Bell Telephone Labor Inc Photomask inspection by spatial filtering
US3813173A (en) * 1972-02-22 1974-05-28 Corning Glass Works Defect sensing apparatus and method
US3743423A (en) * 1972-05-03 1973-07-03 Westinghouse Electric Corp Intensity spatial filter having uniformly spaced filter elements
JPS5324301B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-09-09 1978-07-20

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59934A (ja) * 1983-06-06 1984-01-06 Hitachi Ltd 欠陥検査装置
US4976520A (en) * 1988-09-09 1990-12-11 Grumman Aerospace Corporation Common path multichannel optical processor
US5742422A (en) * 1995-09-19 1998-04-21 Inspex, Inc. Adjustable fourier mask

Also Published As

Publication number Publication date
FR2336662A1 (fr) 1977-07-22
DE2658239A1 (de) 1977-06-30
FR2336662B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-04-16
JPS576521B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-02-05
DE2658239B2 (de) 1979-11-15
US4299443A (en) 1981-11-10
DE2658239C3 (de) 1980-08-07
GB1563259A (en) 1980-03-26
US4153336A (en) 1979-05-08

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