JPS5275978A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5275978A
JPS5275978A JP15298275A JP15298275A JPS5275978A JP S5275978 A JPS5275978 A JP S5275978A JP 15298275 A JP15298275 A JP 15298275A JP 15298275 A JP15298275 A JP 15298275A JP S5275978 A JPS5275978 A JP S5275978A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
disconnection
drain electrode
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15298275A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15298275A priority Critical patent/JPS5275978A/en
Publication of JPS5275978A publication Critical patent/JPS5275978A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the disconnection of source-drain electrode parts by performing impurity diffusion and softening treatment by the same heat treatment in an Si gate MOSFET.
COPYRIGHT: (C)1977,JPO&Japio
JP15298275A 1975-12-22 1975-12-22 Production of semiconductor device Pending JPS5275978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15298275A JPS5275978A (en) 1975-12-22 1975-12-22 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15298275A JPS5275978A (en) 1975-12-22 1975-12-22 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5275978A true JPS5275978A (en) 1977-06-25

Family

ID=15552366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15298275A Pending JPS5275978A (en) 1975-12-22 1975-12-22 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5275978A (en)

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