JPS5275267A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5275267A JPS5275267A JP50152662A JP15266275A JPS5275267A JP S5275267 A JPS5275267 A JP S5275267A JP 50152662 A JP50152662 A JP 50152662A JP 15266275 A JP15266275 A JP 15266275A JP S5275267 A JPS5275267 A JP S5275267A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- time
- heat treatment
- graft bases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 2
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50152662A JPS5275267A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
| US05/751,124 US4102715A (en) | 1975-12-19 | 1976-12-16 | Method for diffusing an impurity into a semiconductor body |
| DE2657415A DE2657415C2 (de) | 1975-12-19 | 1976-12-17 | Verfahren zum Eindiffundieren von Fremdstoffen in ein Halbleitersubstrat |
| FR7638415A FR2335950A1 (fr) | 1975-12-19 | 1976-12-20 | Procede pour realiser la diffusion d'une impurete dans un corps semi-conducteur |
| GB53080/76A GB1581726A (en) | 1975-12-19 | 1976-12-20 | Method for diffusing an impurity into a semiconductor body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50152662A JPS5275267A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5275267A true JPS5275267A (en) | 1977-06-24 |
| JPS5741097B2 JPS5741097B2 (https=) | 1982-09-01 |
Family
ID=15545331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50152662A Granted JPS5275267A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5275267A (https=) |
-
1975
- 1975-12-19 JP JP50152662A patent/JPS5275267A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5741097B2 (https=) | 1982-09-01 |
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