JPS5272189A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5272189A JPS5272189A JP50148692A JP14869275A JPS5272189A JP S5272189 A JPS5272189 A JP S5272189A JP 50148692 A JP50148692 A JP 50148692A JP 14869275 A JP14869275 A JP 14869275A JP S5272189 A JPS5272189 A JP S5272189A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- production
- burying
- flatten
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50148692A JPS5272189A (en) | 1975-12-12 | 1975-12-12 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50148692A JPS5272189A (en) | 1975-12-12 | 1975-12-12 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5272189A true JPS5272189A (en) | 1977-06-16 |
Family
ID=15458455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50148692A Pending JPS5272189A (en) | 1975-12-12 | 1975-12-12 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272189A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575245A (en) * | 1978-12-04 | 1980-06-06 | Fujitsu Ltd | Method of fabricating semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS472519A (en) * | 1970-07-10 | 1972-02-07 |
-
1975
- 1975-12-12 JP JP50148692A patent/JPS5272189A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS472519A (en) * | 1970-07-10 | 1972-02-07 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575245A (en) * | 1978-12-04 | 1980-06-06 | Fujitsu Ltd | Method of fabricating semiconductor device |
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Legal Events
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