JPS5270777A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5270777A
JPS5270777A JP14661175A JP14661175A JPS5270777A JP S5270777 A JPS5270777 A JP S5270777A JP 14661175 A JP14661175 A JP 14661175A JP 14661175 A JP14661175 A JP 14661175A JP S5270777 A JPS5270777 A JP S5270777A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
substrate
different depth
impurity profile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14661175A
Other languages
Japanese (ja)
Inventor
Kinnosuke Okutsu
Takeomi Takase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14661175A priority Critical patent/JPS5270777A/en
Publication of JPS5270777A publication Critical patent/JPS5270777A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To obtain impurity profile of different depth through simultaneous diffusion by diffusing surface concentration on both surface of substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP14661175A 1975-12-09 1975-12-09 Manufacture of semiconductor device Pending JPS5270777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14661175A JPS5270777A (en) 1975-12-09 1975-12-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14661175A JPS5270777A (en) 1975-12-09 1975-12-09 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5270777A true JPS5270777A (en) 1977-06-13

Family

ID=15411638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14661175A Pending JPS5270777A (en) 1975-12-09 1975-12-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5270777A (en)

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