JPS5265690A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5265690A JPS5265690A JP14271575A JP14271575A JPS5265690A JP S5265690 A JPS5265690 A JP S5265690A JP 14271575 A JP14271575 A JP 14271575A JP 14271575 A JP14271575 A JP 14271575A JP S5265690 A JPS5265690 A JP S5265690A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- insulating film
- wiring conductor
- serrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: Occurance of disconnection of a wiring conductor is prevented by forming ridgelines of the insulating film at the serrating portions of the insulating film convering the wiring conductor to such a pattern at which they are not positioned mutually parallel.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14271575A JPS5265690A (en) | 1975-11-26 | 1975-11-26 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14271575A JPS5265690A (en) | 1975-11-26 | 1975-11-26 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5265690A true JPS5265690A (en) | 1977-05-31 |
JPS5733858B2 JPS5733858B2 (en) | 1982-07-20 |
Family
ID=15321881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14271575A Granted JPS5265690A (en) | 1975-11-26 | 1975-11-26 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5265690A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57112027A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1975
- 1975-11-26 JP JP14271575A patent/JPS5265690A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57112027A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of semiconductor device |
JPH0249010B2 (en) * | 1980-12-29 | 1990-10-26 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5733858B2 (en) | 1982-07-20 |
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