JPS523388A - Manufacturing method of mos integrated circuit - Google Patents

Manufacturing method of mos integrated circuit

Info

Publication number
JPS523388A
JPS523388A JP7865575A JP7865575A JPS523388A JP S523388 A JPS523388 A JP S523388A JP 7865575 A JP7865575 A JP 7865575A JP 7865575 A JP7865575 A JP 7865575A JP S523388 A JPS523388 A JP S523388A
Authority
JP
Japan
Prior art keywords
integrated circuit
mos integrated
insulated film
mos
alminium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7865575A
Other languages
Japanese (ja)
Inventor
Kohei Ebara
Kuniki Owada
Original Assignee
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegr & Teleph Corp <Ntt> filed Critical Nippon Telegr & Teleph Corp <Ntt>
Priority to JP7865575A priority Critical patent/JPS523388A/en
Publication of JPS523388A publication Critical patent/JPS523388A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Shortening a manufacturing process and preventing disconnection of alminium wiring due to step by simultaneously forming field insulated film and insulated film between layers.
COPYRIGHT: (C)1977,JPO&Japio
JP7865575A 1975-06-26 1975-06-26 Manufacturing method of mos integrated circuit Pending JPS523388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7865575A JPS523388A (en) 1975-06-26 1975-06-26 Manufacturing method of mos integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7865575A JPS523388A (en) 1975-06-26 1975-06-26 Manufacturing method of mos integrated circuit

Publications (1)

Publication Number Publication Date
JPS523388A true JPS523388A (en) 1977-01-11

Family

ID=13667862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7865575A Pending JPS523388A (en) 1975-06-26 1975-06-26 Manufacturing method of mos integrated circuit

Country Status (1)

Country Link
JP (1) JPS523388A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140255710A1 (en) * 2011-08-12 2014-09-11 National University Corporation Iwate University Polyimide precursor, polyimide, polyimide film, and method for manufacturing triazine compound used for manufacturing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140255710A1 (en) * 2011-08-12 2014-09-11 National University Corporation Iwate University Polyimide precursor, polyimide, polyimide film, and method for manufacturing triazine compound used for manufacturing same
US9511565B2 (en) * 2011-08-12 2016-12-06 Ube Industries, Ltd. Polyimide precursor, polyimide, polyimide film, and method for manufacturing triazine compound used for manufacturing same

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