JPS5256857A - Production of vapor phase growing multilayer film having high impurity concentration thin layer region - Google Patents

Production of vapor phase growing multilayer film having high impurity concentration thin layer region

Info

Publication number
JPS5256857A
JPS5256857A JP13352375A JP13352375A JPS5256857A JP S5256857 A JPS5256857 A JP S5256857A JP 13352375 A JP13352375 A JP 13352375A JP 13352375 A JP13352375 A JP 13352375A JP S5256857 A JPS5256857 A JP S5256857A
Authority
JP
Japan
Prior art keywords
thin layer
multilayer film
vapor phase
impurity concentration
layer region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13352375A
Other languages
Japanese (ja)
Other versions
JPS5838929B2 (en
Inventor
Hisatsune Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13352375A priority Critical patent/JPS5838929B2/en
Publication of JPS5256857A publication Critical patent/JPS5256857A/en
Publication of JPS5838929B2 publication Critical patent/JPS5838929B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE:To obtain ideal vapor phase growing multilayer film haing high impurity concentration thin layer region by mixing impurity gas in the carrier gas with pulsed opening and shutting.
JP13352375A 1975-11-05 1975-11-05 It's hard to see how it's going to turn out. Expired JPS5838929B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13352375A JPS5838929B2 (en) 1975-11-05 1975-11-05 It's hard to see how it's going to turn out.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13352375A JPS5838929B2 (en) 1975-11-05 1975-11-05 It's hard to see how it's going to turn out.

Publications (2)

Publication Number Publication Date
JPS5256857A true JPS5256857A (en) 1977-05-10
JPS5838929B2 JPS5838929B2 (en) 1983-08-26

Family

ID=15106769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13352375A Expired JPS5838929B2 (en) 1975-11-05 1975-11-05 It's hard to see how it's going to turn out.

Country Status (1)

Country Link
JP (1) JPS5838929B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222875A (en) * 2001-01-25 2002-08-09 Sony Corp Non-volatile semiconductor memory device and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002222875A (en) * 2001-01-25 2002-08-09 Sony Corp Non-volatile semiconductor memory device and method of manufacturing the same

Also Published As

Publication number Publication date
JPS5838929B2 (en) 1983-08-26

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