JPS5255475A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5255475A JPS5255475A JP50131593A JP13159375A JPS5255475A JP S5255475 A JPS5255475 A JP S5255475A JP 50131593 A JP50131593 A JP 50131593A JP 13159375 A JP13159375 A JP 13159375A JP S5255475 A JPS5255475 A JP S5255475A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- patterns
- oxidiation
- ics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13159375A JPS5917865B2 (en) | 1975-10-31 | 1975-10-31 | hand tai souchi no seizou houhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13159375A JPS5917865B2 (en) | 1975-10-31 | 1975-10-31 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5255475A true JPS5255475A (en) | 1977-05-06 |
JPS5917865B2 JPS5917865B2 (en) | 1984-04-24 |
Family
ID=15061669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13159375A Expired JPS5917865B2 (en) | 1975-10-31 | 1975-10-31 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5917865B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54140483A (en) * | 1978-04-21 | 1979-10-31 | Nec Corp | Semiconductor device |
JPS54160182A (en) * | 1978-06-06 | 1979-12-18 | Rockwell International Corp | Method of forming self matching contact for semiconductor device |
JPS5694775A (en) * | 1979-12-28 | 1981-07-31 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS59108317A (en) * | 1982-12-13 | 1984-06-22 | Mitsubishi Electric Corp | Forming method of electrode wiring |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63152567U (en) * | 1987-03-25 | 1988-10-06 | ||
JPH01179278U (en) * | 1988-06-08 | 1989-12-22 |
-
1975
- 1975-10-31 JP JP13159375A patent/JPS5917865B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54140483A (en) * | 1978-04-21 | 1979-10-31 | Nec Corp | Semiconductor device |
JPS54160182A (en) * | 1978-06-06 | 1979-12-18 | Rockwell International Corp | Method of forming self matching contact for semiconductor device |
JPS5694775A (en) * | 1979-12-28 | 1981-07-31 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor device |
JPS59108317A (en) * | 1982-12-13 | 1984-06-22 | Mitsubishi Electric Corp | Forming method of electrode wiring |
Also Published As
Publication number | Publication date |
---|---|
JPS5917865B2 (en) | 1984-04-24 |
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