Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP12828875ApriorityCriticalpatent/JPS5252577A/en
Publication of JPS5252577ApublicationCriticalpatent/JPS5252577A/en
PURPOSE: To make possible to control of the size and shape of contact holes by opening contact holes in the oxide film between a PSG film and a semiconductor substrate, further depositing a PSG film and opening contact holes therein.
COPYRIGHT: (C)1977,JPO&Japio
JP12828875A1975-10-271975-10-27Production of semiconductor device
PendingJPS5252577A
(en)