JPS5252186A - Method of pulling up semiconductor single crystal of high decompositio n pressure compound - Google Patents
Method of pulling up semiconductor single crystal of high decompositio n pressure compoundInfo
- Publication number
- JPS5252186A JPS5252186A JP13450076A JP13450076A JPS5252186A JP S5252186 A JPS5252186 A JP S5252186A JP 13450076 A JP13450076 A JP 13450076A JP 13450076 A JP13450076 A JP 13450076A JP S5252186 A JPS5252186 A JP S5252186A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- semiconductor single
- decompositio
- pulling
- pressure compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Uniform sectional, large-sized semiconductor single crystal of a high decomposition pressure compund is pulled up by applying conventional resistance heating in Si and maintaining the temperature of the surface of a raw material liquid within an optimum range.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13450076A JPS5252186A (en) | 1976-11-08 | 1976-11-08 | Method of pulling up semiconductor single crystal of high decompositio n pressure compound |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13450076A JPS5252186A (en) | 1976-11-08 | 1976-11-08 | Method of pulling up semiconductor single crystal of high decompositio n pressure compound |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4057772A Division JPS5237995B2 (en) | 1972-04-22 | 1972-04-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5252186A true JPS5252186A (en) | 1977-04-26 |
Family
ID=15129765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13450076A Pending JPS5252186A (en) | 1976-11-08 | 1976-11-08 | Method of pulling up semiconductor single crystal of high decompositio n pressure compound |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5252186A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494477A (en) * | 1972-04-22 | 1974-01-16 |
-
1976
- 1976-11-08 JP JP13450076A patent/JPS5252186A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494477A (en) * | 1972-04-22 | 1974-01-16 |
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