JPS5250749A - Inspector for defects in directional pattern - Google Patents

Inspector for defects in directional pattern

Info

Publication number
JPS5250749A
JPS5250749A JP12628275A JP12628275A JPS5250749A JP S5250749 A JPS5250749 A JP S5250749A JP 12628275 A JP12628275 A JP 12628275A JP 12628275 A JP12628275 A JP 12628275A JP S5250749 A JPS5250749 A JP S5250749A
Authority
JP
Japan
Prior art keywords
inspector
defects
directional pattern
information
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12628275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS565323B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masakata Minami
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12628275A priority Critical patent/JPS5250749A/ja
Publication of JPS5250749A publication Critical patent/JPS5250749A/ja
Publication of JPS565323B2 publication Critical patent/JPS565323B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP12628275A 1975-10-22 1975-10-22 Inspector for defects in directional pattern Granted JPS5250749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12628275A JPS5250749A (en) 1975-10-22 1975-10-22 Inspector for defects in directional pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12628275A JPS5250749A (en) 1975-10-22 1975-10-22 Inspector for defects in directional pattern

Publications (2)

Publication Number Publication Date
JPS5250749A true JPS5250749A (en) 1977-04-23
JPS565323B2 JPS565323B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-04

Family

ID=14931343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12628275A Granted JPS5250749A (en) 1975-10-22 1975-10-22 Inspector for defects in directional pattern

Country Status (1)

Country Link
JP (1) JPS5250749A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW202239297A (zh) * 2018-09-04 2022-10-01 美商山姆科技公司 超密度低輪廓的邊緣卡連接器

Also Published As

Publication number Publication date
JPS565323B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-04

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