JPS5250284A - Apparatus for inspecting defects of patterns having directional charac teristics - Google Patents

Apparatus for inspecting defects of patterns having directional charac teristics

Info

Publication number
JPS5250284A
JPS5250284A JP50125412A JP12541275A JPS5250284A JP S5250284 A JPS5250284 A JP S5250284A JP 50125412 A JP50125412 A JP 50125412A JP 12541275 A JP12541275 A JP 12541275A JP S5250284 A JPS5250284 A JP S5250284A
Authority
JP
Japan
Prior art keywords
directional
patterns
inspecting defects
charac teristics
coherent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50125412A
Other languages
Japanese (ja)
Inventor
Masakata Minami
Hidekazu Sekizawa
Moritada Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50125412A priority Critical patent/JPS5250284A/en
Publication of JPS5250284A publication Critical patent/JPS5250284A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Character Discrimination (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To prevent burns of filters, by mutually separating the coherent and incoherent information lights having passed through the pattern to be examined, placing a space filter on the optical path of the coherent information light, and extracting defects.
JP50125412A 1975-10-20 1975-10-20 Apparatus for inspecting defects of patterns having directional charac teristics Pending JPS5250284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50125412A JPS5250284A (en) 1975-10-20 1975-10-20 Apparatus for inspecting defects of patterns having directional charac teristics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50125412A JPS5250284A (en) 1975-10-20 1975-10-20 Apparatus for inspecting defects of patterns having directional charac teristics

Publications (1)

Publication Number Publication Date
JPS5250284A true JPS5250284A (en) 1977-04-22

Family

ID=14909457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50125412A Pending JPS5250284A (en) 1975-10-20 1975-10-20 Apparatus for inspecting defects of patterns having directional charac teristics

Country Status (1)

Country Link
JP (1) JPS5250284A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297542A (en) * 1988-05-25 1989-11-30 Csk Corp Defect inspecting device
JPH07331537A (en) * 1994-06-07 1995-12-19 Ikegami Kikai Kk Bale breaker for fiber

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5077082A (en) * 1973-11-08 1975-06-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5077082A (en) * 1973-11-08 1975-06-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297542A (en) * 1988-05-25 1989-11-30 Csk Corp Defect inspecting device
JPH07331537A (en) * 1994-06-07 1995-12-19 Ikegami Kikai Kk Bale breaker for fiber

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