JPS5247379A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247379A
JPS5247379A JP50123697A JP12369775A JPS5247379A JP S5247379 A JPS5247379 A JP S5247379A JP 50123697 A JP50123697 A JP 50123697A JP 12369775 A JP12369775 A JP 12369775A JP S5247379 A JPS5247379 A JP S5247379A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
semiconductor
vessel
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50123697A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5718707B2 (show.php
Inventor
Yutaka Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50123697A priority Critical patent/JPS5247379A/ja
Publication of JPS5247379A publication Critical patent/JPS5247379A/ja
Publication of JPS5718707B2 publication Critical patent/JPS5718707B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/884—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP50123697A 1975-10-13 1975-10-13 Process for production of semiconductor device Granted JPS5247379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50123697A JPS5247379A (en) 1975-10-13 1975-10-13 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50123697A JPS5247379A (en) 1975-10-13 1975-10-13 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5247379A true JPS5247379A (en) 1977-04-15
JPS5718707B2 JPS5718707B2 (show.php) 1982-04-17

Family

ID=14867083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50123697A Granted JPS5247379A (en) 1975-10-13 1975-10-13 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247379A (show.php)

Also Published As

Publication number Publication date
JPS5718707B2 (show.php) 1982-04-17

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