JPS5245883A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5245883A
JPS5245883A JP12072575A JP12072575A JPS5245883A JP S5245883 A JPS5245883 A JP S5245883A JP 12072575 A JP12072575 A JP 12072575A JP 12072575 A JP12072575 A JP 12072575A JP S5245883 A JPS5245883 A JP S5245883A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
oxide film
decreasing
isolating oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12072575A
Other languages
Japanese (ja)
Inventor
Shuichi Nakamura
Kazunari Kobayashi
Minoru Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12072575A priority Critical patent/JPS5245883A/en
Publication of JPS5245883A publication Critical patent/JPS5245883A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To provide a second isolating oxide film on a first isolating oxide film and diffuse an impurity, thereby decreasing junction capacity, and decreasing base sprading resistance owing to high mask matching accuracy.
COPYRIGHT: (C)1977,JPO&Japio
JP12072575A 1975-10-08 1975-10-08 Process for production of semiconductor device Pending JPS5245883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12072575A JPS5245883A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12072575A JPS5245883A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5245883A true JPS5245883A (en) 1977-04-11

Family

ID=14793446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12072575A Pending JPS5245883A (en) 1975-10-08 1975-10-08 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5245883A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232797A (en) * 1988-07-20 1990-02-02 Shimadzu Corp Drive of pulse motor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0232797A (en) * 1988-07-20 1990-02-02 Shimadzu Corp Drive of pulse motor

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