JPS5244584A - Method of treating semiconductor substrate - Google Patents
Method of treating semiconductor substrateInfo
- Publication number
- JPS5244584A JPS5244584A JP50120990A JP12099075A JPS5244584A JP S5244584 A JPS5244584 A JP S5244584A JP 50120990 A JP50120990 A JP 50120990A JP 12099075 A JP12099075 A JP 12099075A JP S5244584 A JPS5244584 A JP S5244584A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- treating semiconductor
- treating
- si3n4
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50120990A JPS5244584A (en) | 1975-10-06 | 1975-10-06 | Method of treating semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50120990A JPS5244584A (en) | 1975-10-06 | 1975-10-06 | Method of treating semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5244584A true JPS5244584A (en) | 1977-04-07 |
Family
ID=14800042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50120990A Pending JPS5244584A (en) | 1975-10-06 | 1975-10-06 | Method of treating semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5244584A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56140641A (en) * | 1980-04-01 | 1981-11-04 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS5952847A (en) * | 1982-09-20 | 1984-03-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US5225658A (en) * | 1988-03-24 | 1993-07-06 | Kabushiki Kaisha Komatsu Seisakusho | Stopping a plasma arc cutter upon completion of cutting |
-
1975
- 1975-10-06 JP JP50120990A patent/JPS5244584A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56140641A (en) * | 1980-04-01 | 1981-11-04 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS6358370B2 (en) * | 1980-04-01 | 1988-11-15 | Matsushita Electric Ind Co Ltd | |
JPS5952847A (en) * | 1982-09-20 | 1984-03-27 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
US5225658A (en) * | 1988-03-24 | 1993-07-06 | Kabushiki Kaisha Komatsu Seisakusho | Stopping a plasma arc cutter upon completion of cutting |
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