JPS5228862A - Process for production of semiconductor element - Google Patents

Process for production of semiconductor element

Info

Publication number
JPS5228862A
JPS5228862A JP50105405A JP10540575A JPS5228862A JP S5228862 A JPS5228862 A JP S5228862A JP 50105405 A JP50105405 A JP 50105405A JP 10540575 A JP10540575 A JP 10540575A JP S5228862 A JPS5228862 A JP S5228862A
Authority
JP
Japan
Prior art keywords
production
semiconductor element
bcl
diffuse
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50105405A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5344792B2 (index.php
Inventor
Motonori Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50105405A priority Critical patent/JPS5228862A/ja
Publication of JPS5228862A publication Critical patent/JPS5228862A/ja
Publication of JPS5344792B2 publication Critical patent/JPS5344792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP50105405A 1975-08-29 1975-08-29 Process for production of semiconductor element Granted JPS5228862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50105405A JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50105405A JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5228862A true JPS5228862A (en) 1977-03-04
JPS5344792B2 JPS5344792B2 (index.php) 1978-12-01

Family

ID=14406695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50105405A Granted JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5228862A (index.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232550A (en) * 1987-04-27 1993-08-03 Ohkawara Kakohki Co., Ltd. Vacuum drying method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232550A (en) * 1987-04-27 1993-08-03 Ohkawara Kakohki Co., Ltd. Vacuum drying method

Also Published As

Publication number Publication date
JPS5344792B2 (index.php) 1978-12-01

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