JPS5344792B2 - - Google Patents

Info

Publication number
JPS5344792B2
JPS5344792B2 JP10540575A JP10540575A JPS5344792B2 JP S5344792 B2 JPS5344792 B2 JP S5344792B2 JP 10540575 A JP10540575 A JP 10540575A JP 10540575 A JP10540575 A JP 10540575A JP S5344792 B2 JPS5344792 B2 JP S5344792B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10540575A
Other languages
Japanese (ja)
Other versions
JPS5228862A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50105405A priority Critical patent/JPS5228862A/ja
Publication of JPS5228862A publication Critical patent/JPS5228862A/ja
Publication of JPS5344792B2 publication Critical patent/JPS5344792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP50105405A 1975-08-29 1975-08-29 Process for production of semiconductor element Granted JPS5228862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50105405A JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50105405A JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5228862A JPS5228862A (en) 1977-03-04
JPS5344792B2 true JPS5344792B2 (index.php) 1978-12-01

Family

ID=14406695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50105405A Granted JPS5228862A (en) 1975-08-29 1975-08-29 Process for production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5228862A (index.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232550A (en) * 1987-04-27 1993-08-03 Ohkawara Kakohki Co., Ltd. Vacuum drying method

Also Published As

Publication number Publication date
JPS5228862A (en) 1977-03-04

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