JPS5225574A - Production method of semiconsuctor device - Google Patents
Production method of semiconsuctor deviceInfo
- Publication number
- JPS5225574A JPS5225574A JP10147975A JP10147975A JPS5225574A JP S5225574 A JPS5225574 A JP S5225574A JP 10147975 A JP10147975 A JP 10147975A JP 10147975 A JP10147975 A JP 10147975A JP S5225574 A JPS5225574 A JP S5225574A
- Authority
- JP
- Japan
- Prior art keywords
- semiconsuctor
- production method
- etching
- monitor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To form the penetration hole without generating under-and over-etching on the protection film, by using a monitor with which the observation independent from the semiconductor is easy.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10147975A JPS5225574A (en) | 1975-08-21 | 1975-08-21 | Production method of semiconsuctor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10147975A JPS5225574A (en) | 1975-08-21 | 1975-08-21 | Production method of semiconsuctor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5225574A true JPS5225574A (en) | 1977-02-25 |
Family
ID=14301847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10147975A Pending JPS5225574A (en) | 1975-08-21 | 1975-08-21 | Production method of semiconsuctor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5225574A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5152545A (en) * | 1974-11-02 | 1976-05-10 | Kawasaki Heavy Ind Ltd | Kyushureitokino ketsushoboshisochi |
JPS5152547A (en) * | 1974-11-02 | 1976-05-10 | Kawasaki Heavy Ind Ltd | Kyushureitokino untenteishihoshiki |
JPS5627933A (en) * | 1979-08-14 | 1981-03-18 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4837225A (en) * | 1971-09-14 | 1973-06-01 |
-
1975
- 1975-08-21 JP JP10147975A patent/JPS5225574A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4837225A (en) * | 1971-09-14 | 1973-06-01 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5152545A (en) * | 1974-11-02 | 1976-05-10 | Kawasaki Heavy Ind Ltd | Kyushureitokino ketsushoboshisochi |
JPS5152547A (en) * | 1974-11-02 | 1976-05-10 | Kawasaki Heavy Ind Ltd | Kyushureitokino untenteishihoshiki |
JPS5627933A (en) * | 1979-08-14 | 1981-03-18 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51126894A (en) | Voltammetry apparatus | |
JPS5225574A (en) | Production method of semiconsuctor device | |
JPS5255871A (en) | Production of semiconductor | |
JPS5223237A (en) | Passbook handling device | |
JPS5230167A (en) | Method for production of semiconductor device | |
JPS53120383A (en) | Production of semiconductor device | |
JPS52154528A (en) | Remedy for glaucoma | |
JPS53142877A (en) | Manufacture for compound semiconductor device | |
JPS51111071A (en) | Semiconductor equipment | |
JPS5228868A (en) | Semiconductor device | |
JPS52130567A (en) | Preparation of semiconductor device | |
JPS51120510A (en) | Device for preventing the error departure of train | |
JPS51147920A (en) | Memory device | |
JPS5234698A (en) | Burglarproof method | |
JPS52143186A (en) | Taping device | |
JPS51138166A (en) | Production method of semiconductor device | |
JPS51131277A (en) | Semi-conductor unit manufacturing process | |
JPS5264280A (en) | Semiconductor device | |
JPS51140554A (en) | Indicating device | |
JPS5213122A (en) | Fluid-use joint device | |
JPS5357487A (en) | Transfer process of cable | |
JPS5260071A (en) | Production of semiconductor device | |
JPS5235094A (en) | Device for enabling steep turn of a ship | |
JPS5231681A (en) | Production method of semiconductor device | |
JPS53132260A (en) | Production of semiconductor device |