JPS5231681A - Production method of semiconductor device - Google Patents

Production method of semiconductor device

Info

Publication number
JPS5231681A
JPS5231681A JP10696975A JP10696975A JPS5231681A JP S5231681 A JPS5231681 A JP S5231681A JP 10696975 A JP10696975 A JP 10696975A JP 10696975 A JP10696975 A JP 10696975A JP S5231681 A JPS5231681 A JP S5231681A
Authority
JP
Japan
Prior art keywords
semiconductor device
production method
oxidating
ditch
diffusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10696975A
Other languages
Japanese (ja)
Inventor
Takashi Ishikawa
Koichiro Mizukami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10696975A priority Critical patent/JPS5231681A/en
Publication of JPS5231681A publication Critical patent/JPS5231681A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To produce a bipolar IC with high pressure and back pressure and without the bird head, by means of diffusing the impurity on the bottom of ditch being formed on the insulation film on the base plate thereby oxidating it.
COPYRIGHT: (C)1977,JPO&Japio
JP10696975A 1975-09-05 1975-09-05 Production method of semiconductor device Pending JPS5231681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10696975A JPS5231681A (en) 1975-09-05 1975-09-05 Production method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10696975A JPS5231681A (en) 1975-09-05 1975-09-05 Production method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5231681A true JPS5231681A (en) 1977-03-10

Family

ID=14447129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10696975A Pending JPS5231681A (en) 1975-09-05 1975-09-05 Production method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5231681A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130446A (en) * 1981-02-05 1982-08-12 Nec Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57130446A (en) * 1981-02-05 1982-08-12 Nec Corp Manufacture of semiconductor device
JPS6217864B2 (en) * 1981-02-05 1987-04-20 Nippon Electric Co

Similar Documents

Publication Publication Date Title
JPS51123561A (en) Production method of semicondvctor device
JPS5255871A (en) Production of semiconductor
JPS5231681A (en) Production method of semiconductor device
JPS5231686A (en) Production method of semiconductor device
JPS5363871A (en) Production of semiconductor device
JPS5272586A (en) Production of semiconductor device
JPS51146192A (en) Diode device fabrication method
JPS51130169A (en) Semiconductor device
JPS5217768A (en) Production method of semi-conductor device
JPS5231680A (en) Production method of semiconductor device
JPS5261960A (en) Production of semiconductor device
JPS5228868A (en) Semiconductor device
JPS5383462A (en) Production of semiconductor device
JPS546461A (en) Manufacture of semiconductor device
JPS5225574A (en) Production method of semiconsuctor device
JPS5377168A (en) Production of semiconductor device
JPS5273673A (en) Production of semiconductor device
JPS51151089A (en) Manufacturing method of a semiconductor
JPS5253667A (en) Production of semiconductor device
JPS52154343A (en) Production of semiconductor device
JPS528787A (en) Semiconductor device process
JPS5211772A (en) Semiconductor device
JPS5353255A (en) Manufacture of semiconductor device
JPS51114083A (en) Construction of a semiconductor device
JPS51132763A (en) Production method of semiconductor device