JPS522293A - Method of formig wiring layer - Google Patents

Method of formig wiring layer

Info

Publication number
JPS522293A
JPS522293A JP7670275A JP7670275A JPS522293A JP S522293 A JPS522293 A JP S522293A JP 7670275 A JP7670275 A JP 7670275A JP 7670275 A JP7670275 A JP 7670275A JP S522293 A JPS522293 A JP S522293A
Authority
JP
Japan
Prior art keywords
formig
wiring layer
wiring pattern
etching liquid
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7670275A
Other languages
English (en)
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7670275A priority Critical patent/JPS522293A/ja
Publication of JPS522293A publication Critical patent/JPS522293A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7670275A 1975-06-24 1975-06-24 Method of formig wiring layer Pending JPS522293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7670275A JPS522293A (en) 1975-06-24 1975-06-24 Method of formig wiring layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7670275A JPS522293A (en) 1975-06-24 1975-06-24 Method of formig wiring layer

Publications (1)

Publication Number Publication Date
JPS522293A true JPS522293A (en) 1977-01-08

Family

ID=13612830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7670275A Pending JPS522293A (en) 1975-06-24 1975-06-24 Method of formig wiring layer

Country Status (1)

Country Link
JP (1) JPS522293A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094727A (ja) * 1983-06-27 1985-05-27 ピ−エスアイ　スタ− 液体エツチング用反応器および方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6094727A (ja) * 1983-06-27 1985-05-27 ピ−エスアイ　スタ− 液体エツチング用反応器および方法

Similar Documents

Publication Publication Date Title
JPS51147179A (en) Method of munufacturing of semiconductor device
JPS522173A (en) Semiconductor integrated circuit
JPS522293A (en) Method of formig wiring layer
JPS51112193A (en) Processing method of semiconductor equipment
JPS5271978A (en) Production of semiconductor device
JPS5261960A (en) Production of semiconductor device
JPS5272571A (en) Production of semiconductor device
JPS5384693A (en) Production of semiconductor device
JPS51123086A (en) Semicanductor device and its production process
JPS5268388A (en) Semiconductor integrated circuit
JPS5347281A (en) Production of semiconductor device
JPS542667A (en) Manufacture of semiconductor device
JPS5315768A (en) Production of semiconductor device
JPS5218169A (en) Production method of semiconductor
JPS5275279A (en) Packaging structure for semiconductor devices
JPS52147084A (en) Production of semiconductor device
JPS5251872A (en) Production of semiconductor device
JPS53108773A (en) Production of semiconductor device
JPS5271993A (en) Production of semiconductor integrated circuit device
JPS5330874A (en) Semiconductor element mounting device
JPS5367386A (en) Semiconductor device
JPS52130292A (en) Patterning method
JPS5228265A (en) Semiconductor device
JPS5210676A (en) Semiconductor device
JPS51151089A (en) Manufacturing method of a semiconductor