JPS5219087A - Production method of semiconductor device - Google Patents

Production method of semiconductor device

Info

Publication number
JPS5219087A
JPS5219087A JP9471375A JP9471375A JPS5219087A JP S5219087 A JPS5219087 A JP S5219087A JP 9471375 A JP9471375 A JP 9471375A JP 9471375 A JP9471375 A JP 9471375A JP S5219087 A JPS5219087 A JP S5219087A
Authority
JP
Japan
Prior art keywords
semiconductor device
production method
lation
vip
disconnection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9471375A
Other languages
English (en)
Inventor
Yunosuke Kawabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9471375A priority Critical patent/JPS5219087A/ja
Publication of JPS5219087A publication Critical patent/JPS5219087A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP9471375A 1975-08-05 1975-08-05 Production method of semiconductor device Pending JPS5219087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9471375A JPS5219087A (en) 1975-08-05 1975-08-05 Production method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9471375A JPS5219087A (en) 1975-08-05 1975-08-05 Production method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5219087A true JPS5219087A (en) 1977-01-14

Family

ID=14117778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9471375A Pending JPS5219087A (en) 1975-08-05 1975-08-05 Production method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5219087A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法
JPS61111017U (ja) * 1984-12-24 1986-07-14
JPS6283211U (ja) * 1985-11-15 1987-05-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法
JPS61111017U (ja) * 1984-12-24 1986-07-14
JPS6283211U (ja) * 1985-11-15 1987-05-27

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