JPS5219067A - Breakaway separator of semiconductor wafer - Google Patents

Breakaway separator of semiconductor wafer

Info

Publication number
JPS5219067A
JPS5219067A JP9559375A JP9559375A JPS5219067A JP S5219067 A JPS5219067 A JP S5219067A JP 9559375 A JP9559375 A JP 9559375A JP 9559375 A JP9559375 A JP 9559375A JP S5219067 A JPS5219067 A JP S5219067A
Authority
JP
Japan
Prior art keywords
breakaway
separator
semiconductor wafer
wafer
extensibility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9559375A
Other languages
Japanese (ja)
Inventor
Shigeki Hayase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9559375A priority Critical patent/JPS5219067A/en
Publication of JPS5219067A publication Critical patent/JPS5219067A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: In order to obtain a wafer-breakaway separator which can perform the breakaway separation with the state of constantly applying the extensibility on the surface of wafer from the surroundings and its automatic production is easy.
COPYRIGHT: (C)1977,JPO&Japio
JP9559375A 1975-08-06 1975-08-06 Breakaway separator of semiconductor wafer Pending JPS5219067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9559375A JPS5219067A (en) 1975-08-06 1975-08-06 Breakaway separator of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9559375A JPS5219067A (en) 1975-08-06 1975-08-06 Breakaway separator of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5219067A true JPS5219067A (en) 1977-01-14

Family

ID=14141860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9559375A Pending JPS5219067A (en) 1975-08-06 1975-08-06 Breakaway separator of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5219067A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681938A (en) * 1979-10-05 1981-07-04 Shinkawa Ltd Limit detecting device of die-bonder
CN103786271A (en) * 2012-10-29 2014-05-14 三星钻石工业股份有限公司 Breaking apparatus and breaking method for multi-layered fragile material substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5681938A (en) * 1979-10-05 1981-07-04 Shinkawa Ltd Limit detecting device of die-bonder
JPS5746211B2 (en) * 1979-10-05 1982-10-01
CN103786271A (en) * 2012-10-29 2014-05-14 三星钻石工业股份有限公司 Breaking apparatus and breaking method for multi-layered fragile material substrate

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