JPS52156782A - Planetary jig for vacuum evaporation - Google Patents

Planetary jig for vacuum evaporation

Info

Publication number
JPS52156782A
JPS52156782A JP7314976A JP7314976A JPS52156782A JP S52156782 A JPS52156782 A JP S52156782A JP 7314976 A JP7314976 A JP 7314976A JP 7314976 A JP7314976 A JP 7314976A JP S52156782 A JPS52156782 A JP S52156782A
Authority
JP
Japan
Prior art keywords
vacuum evaporation
planetary jig
evaporated
back surface
planetary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7314976A
Other languages
Japanese (ja)
Inventor
Hachiro Koyama
Ichiro Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7314976A priority Critical patent/JPS52156782A/en
Publication of JPS52156782A publication Critical patent/JPS52156782A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To prevent the sticking of the evaporated substance to the back surface of the back surface of the material to be evaporated (e.g. semiconductor wafer) due to goinground of the evaporated substance, by arranging the shutter plate formed so as to cover the groove at the circumferential part of the substrate while conforming to the groove part.
JP7314976A 1976-06-23 1976-06-23 Planetary jig for vacuum evaporation Pending JPS52156782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7314976A JPS52156782A (en) 1976-06-23 1976-06-23 Planetary jig for vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7314976A JPS52156782A (en) 1976-06-23 1976-06-23 Planetary jig for vacuum evaporation

Publications (1)

Publication Number Publication Date
JPS52156782A true JPS52156782A (en) 1977-12-27

Family

ID=13509834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7314976A Pending JPS52156782A (en) 1976-06-23 1976-06-23 Planetary jig for vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS52156782A (en)

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