JPS52152170A - Selective removal method of silicon oxide film - Google Patents

Selective removal method of silicon oxide film

Info

Publication number
JPS52152170A
JPS52152170A JP6880576A JP6880576A JPS52152170A JP S52152170 A JPS52152170 A JP S52152170A JP 6880576 A JP6880576 A JP 6880576A JP 6880576 A JP6880576 A JP 6880576A JP S52152170 A JPS52152170 A JP S52152170A
Authority
JP
Japan
Prior art keywords
oxide film
silicon oxide
removal method
selective removal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6880576A
Other languages
Japanese (ja)
Inventor
Akira Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6880576A priority Critical patent/JPS52152170A/en
Publication of JPS52152170A publication Critical patent/JPS52152170A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent the production of pinholes by selectively removing SiO2 after laminating a film such as Al film, for which etching solution differs from that for SiO2, on a SiO2 film in a gas atmosphere under a reduced pressure.
COPYRIGHT: (C)1977,JPO&Japio
JP6880576A 1976-06-14 1976-06-14 Selective removal method of silicon oxide film Pending JPS52152170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6880576A JPS52152170A (en) 1976-06-14 1976-06-14 Selective removal method of silicon oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6880576A JPS52152170A (en) 1976-06-14 1976-06-14 Selective removal method of silicon oxide film

Publications (1)

Publication Number Publication Date
JPS52152170A true JPS52152170A (en) 1977-12-17

Family

ID=13384289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6880576A Pending JPS52152170A (en) 1976-06-14 1976-06-14 Selective removal method of silicon oxide film

Country Status (1)

Country Link
JP (1) JPS52152170A (en)

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