JPS52142486A - Fine pattern transfer method - Google Patents
Fine pattern transfer methodInfo
- Publication number
- JPS52142486A JPS52142486A JP5904576A JP5904576A JPS52142486A JP S52142486 A JPS52142486 A JP S52142486A JP 5904576 A JP5904576 A JP 5904576A JP 5904576 A JP5904576 A JP 5904576A JP S52142486 A JPS52142486 A JP S52142486A
- Authority
- JP
- Japan
- Prior art keywords
- transfer method
- fine pattern
- pattern transfer
- mask
- transferred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To transfer fine patterns at high accuracy by reducing the air pressure between the object to be transferred and a mask to contact the mask closely to the object.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5904576A JPS52142486A (en) | 1976-05-24 | 1976-05-24 | Fine pattern transfer method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5904576A JPS52142486A (en) | 1976-05-24 | 1976-05-24 | Fine pattern transfer method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52142486A true JPS52142486A (en) | 1977-11-28 |
Family
ID=13101936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5904576A Pending JPS52142486A (en) | 1976-05-24 | 1976-05-24 | Fine pattern transfer method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52142486A (en) |
-
1976
- 1976-05-24 JP JP5904576A patent/JPS52142486A/en active Pending
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