JPS52142486A - Fine pattern transfer method - Google Patents

Fine pattern transfer method

Info

Publication number
JPS52142486A
JPS52142486A JP5904576A JP5904576A JPS52142486A JP S52142486 A JPS52142486 A JP S52142486A JP 5904576 A JP5904576 A JP 5904576A JP 5904576 A JP5904576 A JP 5904576A JP S52142486 A JPS52142486 A JP S52142486A
Authority
JP
Japan
Prior art keywords
transfer method
fine pattern
pattern transfer
mask
transferred
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5904576A
Other languages
Japanese (ja)
Inventor
Shinichiro Takasu
Sadao Sakurai
Tetsunori Wada
Shusuke Kotake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5904576A priority Critical patent/JPS52142486A/en
Publication of JPS52142486A publication Critical patent/JPS52142486A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To transfer fine patterns at high accuracy by reducing the air pressure between the object to be transferred and a mask to contact the mask closely to the object.
COPYRIGHT: (C)1977,JPO&Japio
JP5904576A 1976-05-24 1976-05-24 Fine pattern transfer method Pending JPS52142486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5904576A JPS52142486A (en) 1976-05-24 1976-05-24 Fine pattern transfer method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5904576A JPS52142486A (en) 1976-05-24 1976-05-24 Fine pattern transfer method

Publications (1)

Publication Number Publication Date
JPS52142486A true JPS52142486A (en) 1977-11-28

Family

ID=13101936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5904576A Pending JPS52142486A (en) 1976-05-24 1976-05-24 Fine pattern transfer method

Country Status (1)

Country Link
JP (1) JPS52142486A (en)

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