JPS52141592A - Process of semiconductor device - Google Patents
Process of semiconductor deviceInfo
- Publication number
- JPS52141592A JPS52141592A JP5873876A JP5873876A JPS52141592A JP S52141592 A JPS52141592 A JP S52141592A JP 5873876 A JP5873876 A JP 5873876A JP 5873876 A JP5873876 A JP 5873876A JP S52141592 A JPS52141592 A JP S52141592A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- insulator layer
- electrode windows
- giving
- advance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5873876A JPS52141592A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5873876A JPS52141592A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52141592A true JPS52141592A (en) | 1977-11-25 |
Family
ID=13092847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5873876A Pending JPS52141592A (en) | 1976-05-20 | 1976-05-20 | Process of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52141592A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6396923A (ja) * | 1986-10-06 | 1988-04-27 | インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション | ヴァイア形成方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127464A (ja) * | 1974-08-23 | 1976-03-08 | Hitachi Ltd | Horiimidokeijushimakuno sentakutekietsuchinguhoho |
-
1976
- 1976-05-20 JP JP5873876A patent/JPS52141592A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127464A (ja) * | 1974-08-23 | 1976-03-08 | Hitachi Ltd | Horiimidokeijushimakuno sentakutekietsuchinguhoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6396923A (ja) * | 1986-10-06 | 1988-04-27 | インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション | ヴァイア形成方法 |
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