JPS52140355A - Method of measuring thickness of thin film - Google Patents

Method of measuring thickness of thin film

Info

Publication number
JPS52140355A
JPS52140355A JP5651677A JP5651677A JPS52140355A JP S52140355 A JPS52140355 A JP S52140355A JP 5651677 A JP5651677 A JP 5651677A JP 5651677 A JP5651677 A JP 5651677A JP S52140355 A JPS52140355 A JP S52140355A
Authority
JP
Japan
Prior art keywords
thin film
measuring thickness
measuring
thickness
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5651677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5735768B2 (Direct
Inventor
Ramon Marudonado Jiyuan
Meidan Dan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of JPS52140355A publication Critical patent/JPS52140355A/ja
Publication of JPS5735768B2 publication Critical patent/JPS5735768B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP5651677A 1976-05-18 1977-05-18 Method of measuring thickness of thin film Granted JPS52140355A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68746276A 1976-05-18 1976-05-18

Publications (2)

Publication Number Publication Date
JPS52140355A true JPS52140355A (en) 1977-11-22
JPS5735768B2 JPS5735768B2 (Direct) 1982-07-30

Family

ID=24760542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651677A Granted JPS52140355A (en) 1976-05-18 1977-05-18 Method of measuring thickness of thin film

Country Status (6)

Country Link
JP (1) JPS52140355A (Direct)
CA (1) CA1086870A (Direct)
DE (1) DE2721589A1 (Direct)
FR (1) FR2393266A1 (Direct)
GB (1) GB1561313A (Direct)
NL (1) NL185306C (Direct)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140105A (ja) * 1983-12-27 1985-07-25 Shimadzu Corp 多層膜分析装置
JPS60142205A (ja) * 1983-12-29 1985-07-27 Shimadzu Corp 多層膜分析装置
JP2000292141A (ja) * 1999-04-07 2000-10-20 Fujitsu Ltd 蛍光ｘ線を用いた膜厚測定方法
JP2009109246A (ja) * 2007-10-26 2009-05-21 Sharp Corp 膜厚測定方法
JP2011153062A (ja) * 2009-12-28 2011-08-11 Denso Corp Ｃｎｔワイヤの製造方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI59489C (fi) * 1978-11-21 1981-08-10 Enso Gutzeit Oy Foerfarande foer maetning av belaeggningsmaengder
JPS5758300U (Direct) * 1980-09-22 1982-04-06
DE3129049A1 (de) * 1981-07-23 1983-02-24 Hoesch Werke Ag, 4600 Dortmund Verfahren und vorrichtung zur zerstoerungsfreien bestimmung der dicke der eisen-zinn-zwischenschicht an elektrolytisch verzinntem blech
DD278866A1 (de) * 1987-11-20 1990-05-16 Akad Wissenschaften Ddr Verfahren zur phosphorgehaltsbestimmung in stromlos abgeschiedenen metallueberzuegen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874864A (Direct) * 1971-12-29 1973-10-09
JPS4919222A (Direct) * 1972-06-15 1974-02-20

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4874864A (Direct) * 1971-12-29 1973-10-09
JPS4919222A (Direct) * 1972-06-15 1974-02-20

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140105A (ja) * 1983-12-27 1985-07-25 Shimadzu Corp 多層膜分析装置
JPS60142205A (ja) * 1983-12-29 1985-07-27 Shimadzu Corp 多層膜分析装置
JP2000292141A (ja) * 1999-04-07 2000-10-20 Fujitsu Ltd 蛍光ｘ線を用いた膜厚測定方法
JP2009109246A (ja) * 2007-10-26 2009-05-21 Sharp Corp 膜厚測定方法
JP2011153062A (ja) * 2009-12-28 2011-08-11 Denso Corp Ｃｎｔワイヤの製造方法

Also Published As

Publication number Publication date
FR2393266A1 (fr) 1978-12-29
FR2393266B1 (Direct) 1982-03-19
NL185306B (nl) 1989-10-02
GB1561313A (en) 1980-02-20
CA1086870A (en) 1980-09-30
JPS5735768B2 (Direct) 1982-07-30
NL185306C (nl) 1990-03-01
NL7705443A (nl) 1977-11-22
DE2721589A1 (de) 1977-12-01

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