JPS52149148A - Method of and apparatus for measuring thickness of film on sheet - Google Patents

Method of and apparatus for measuring thickness of film on sheet

Info

Publication number
JPS52149148A
JPS52149148A JP6414776A JP6414776A JPS52149148A JP S52149148 A JPS52149148 A JP S52149148A JP 6414776 A JP6414776 A JP 6414776A JP 6414776 A JP6414776 A JP 6414776A JP S52149148 A JPS52149148 A JP S52149148A
Authority
JP
Japan
Prior art keywords
sheet
film
measuring thickness
measuring
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6414776A
Other languages
Japanese (ja)
Inventor
Ii Goorudobaagu Aasaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AAKON Inc
Original Assignee
AAKON Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AAKON Inc filed Critical AAKON Inc
Priority to JP6414776A priority Critical patent/JPS52149148A/en
Publication of JPS52149148A publication Critical patent/JPS52149148A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP6414776A 1976-06-03 1976-06-03 Method of and apparatus for measuring thickness of film on sheet Pending JPS52149148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6414776A JPS52149148A (en) 1976-06-03 1976-06-03 Method of and apparatus for measuring thickness of film on sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6414776A JPS52149148A (en) 1976-06-03 1976-06-03 Method of and apparatus for measuring thickness of film on sheet

Publications (1)

Publication Number Publication Date
JPS52149148A true JPS52149148A (en) 1977-12-12

Family

ID=13249664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6414776A Pending JPS52149148A (en) 1976-06-03 1976-06-03 Method of and apparatus for measuring thickness of film on sheet

Country Status (1)

Country Link
JP (1) JPS52149148A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562303A (en) * 1978-11-01 1980-05-10 Kanai Hiroyuki Measuring device for card web unevenness
JPH04233745A (en) * 1990-08-09 1992-08-21 Applied Materials Inc Method and apparatus for measurement in situ of thickness of thin film deposited on wafer
JP2002309260A (en) * 2001-04-09 2002-10-23 Nippon Steel Chem Co Ltd Cutting method for coke oven port and apparatus therfor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48104568A (en) * 1972-04-14 1973-12-27
JPS4957859A (en) * 1972-06-07 1974-06-05
JPS49134351A (en) * 1973-04-25 1974-12-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48104568A (en) * 1972-04-14 1973-12-27
JPS4957859A (en) * 1972-06-07 1974-06-05
JPS49134351A (en) * 1973-04-25 1974-12-24

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562303A (en) * 1978-11-01 1980-05-10 Kanai Hiroyuki Measuring device for card web unevenness
JPS6125082B2 (en) * 1978-11-01 1986-06-13 Kanai Hiroyuki
JPH04233745A (en) * 1990-08-09 1992-08-21 Applied Materials Inc Method and apparatus for measurement in situ of thickness of thin film deposited on wafer
JPH07101704B2 (en) * 1990-08-09 1995-11-01 アプライド マテリアルズ インコーポレイテッド Method and apparatus for in-situ measurement of thin film thickness deposited on a wafer
JP2002309260A (en) * 2001-04-09 2002-10-23 Nippon Steel Chem Co Ltd Cutting method for coke oven port and apparatus therfor

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