JPS52128065A - Pattern formation of semiconductor element - Google Patents
Pattern formation of semiconductor elementInfo
- Publication number
- JPS52128065A JPS52128065A JP4507376A JP4507376A JPS52128065A JP S52128065 A JPS52128065 A JP S52128065A JP 4507376 A JP4507376 A JP 4507376A JP 4507376 A JP4507376 A JP 4507376A JP S52128065 A JPS52128065 A JP S52128065A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- pattern formation
- pattern
- prescribed
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To form the pattern as prescribed on the substrate with no use of mask nor resist by having scanning and irradiation of the electronic beam in an atmosphere of oxidizable gas.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4507376A JPS52128065A (en) | 1976-04-20 | 1976-04-20 | Pattern formation of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4507376A JPS52128065A (en) | 1976-04-20 | 1976-04-20 | Pattern formation of semiconductor element |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9473085A Division JPS6127639A (en) | 1985-05-02 | 1985-05-02 | Formation of oxide film pattern of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52128065A true JPS52128065A (en) | 1977-10-27 |
Family
ID=12709156
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4507376A Pending JPS52128065A (en) | 1976-04-20 | 1976-04-20 | Pattern formation of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52128065A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5533033A (en) * | 1978-08-28 | 1980-03-08 | Nec Corp | Manufacture of oxide film of semiconductor |
-
1976
- 1976-04-20 JP JP4507376A patent/JPS52128065A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5533033A (en) * | 1978-08-28 | 1980-03-08 | Nec Corp | Manufacture of oxide film of semiconductor |
JPS6145855B2 (en) * | 1978-08-28 | 1986-10-09 | Nippon Electric Co |
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